12/23/2010	9:40:10 AM	Recipe started at 9:40 AM
12/23/2010	9:40:10 AM	Helium valve closed
12/23/2010	9:40:10 AM	BCl3 valve closed
12/23/2010	9:40:10 AM	PH3 valve closed
12/23/2010	9:40:10 AM	SiCl4 pre valve closed
12/23/2010	9:40:10 AM	SiCl4 post valve closed
12/23/2010	9:40:10 AM	Main Vac valve closed
12/23/2010	9:40:10 AM	Bypass valve closed
12/23/2010	9:40:10 AM	Bubbler valve closed
12/23/2010	9:40:10 AM	H2 valve opened
12/23/2010	9:40:10 AM	Helium MFC set to  0.000000
12/23/2010	9:40:10 AM	H2 MFC set to  500.000000
12/23/2010	9:40:10 AM	BCl3 MFC set to  0.000000
12/23/2010	9:40:10 AM	PHl3 MFC set to  0.000000
12/23/2010	9:40:10 AM	SiCl4 MFC set to  0.000000
12/23/2010	9:40:10 AM	Bypass solenoid MFC set to  0.000000
12/23/2010	9:40:10 AM	Tube furnace set to 0
12/23/2010	9:41:32 AM	Helium valve closed
12/23/2010	9:41:32 AM	BCl3 valve closed
12/23/2010	9:41:32 AM	PH3 valve closed
12/23/2010	9:41:32 AM	SiCl4 pre valve closed
12/23/2010	9:41:32 AM	SiCl4 post valve closed
12/23/2010	9:41:32 AM	Main Vac valve closed
12/23/2010	9:41:32 AM	Bypass valve closed
12/23/2010	9:41:32 AM	H2 valve opened
12/23/2010	9:41:32 AM	Bubbler valve opened
12/23/2010	9:41:32 AM	Helium MFC set to  0.000000
12/23/2010	9:41:32 AM	H2 MFC set to  500.000000
12/23/2010	9:41:32 AM	BCl3 MFC set to  0.000000
12/23/2010	9:41:32 AM	PHl3 MFC set to  0.000000
12/23/2010	9:41:32 AM	SiCl4 MFC set to  0.000000
12/23/2010	9:41:32 AM	Bypass solenoid MFC set to  0.000000
12/23/2010	9:41:32 AM	Tube furnace set to 1000
12/23/2010	10:01:32 AM	Helium valve closed
12/23/2010	10:01:32 AM	PH3 valve closed
12/23/2010	10:01:32 AM	Main Vac valve closed
12/23/2010	10:01:32 AM	Bypass valve closed
12/23/2010	10:01:32 AM	H2 valve opened
12/23/2010	10:01:32 AM	BCl3 valve opened
12/23/2010	10:01:32 AM	SiCl4 pre valve opened
12/23/2010	10:01:32 AM	SiCl4 post valve opened
12/23/2010	10:01:32 AM	Bubbler valve opened
12/23/2010	10:01:32 AM	Helium MFC set to  0.000000
12/23/2010	10:01:32 AM	H2 MFC set to  500.000000
12/23/2010	10:01:32 AM	BCl3 MFC set to  12.000000
12/23/2010	10:01:32 AM	PHl3 MFC set to  0.000000
12/23/2010	10:01:32 AM	SiCl4 MFC set to  50.000000
12/23/2010	10:01:32 AM	Bypass solenoid MFC set to  0.000000
12/23/2010	10:01:33 AM	Tube furnace set to 1000
12/23/2010	10:21:33 AM	H2 valve closed
12/23/2010	10:21:33 AM	BCl3 valve closed
12/23/2010	10:21:33 AM	PH3 valve closed
12/23/2010	10:21:33 AM	SiCl4 pre valve closed
12/23/2010	10:21:33 AM	SiCl4 post valve closed
12/23/2010	10:21:33 AM	Main Vac valve closed
12/23/2010	10:21:33 AM	Bypass valve closed
12/23/2010	10:21:33 AM	Helium valve opened
12/23/2010	10:21:33 AM	Bubbler valve opened
12/23/2010	10:21:33 AM	Helium MFC set to  500.000000
12/23/2010	10:21:33 AM	H2 MFC set to  0.000000
12/23/2010	10:21:33 AM	BCl3 MFC set to  0.000000
12/23/2010	10:21:33 AM	PHl3 MFC set to  0.000000
12/23/2010	10:21:33 AM	SiCl4 MFC set to  0.000000
12/23/2010	10:21:33 AM	Bypass solenoid MFC set to  0.000000
12/23/2010	10:21:33 AM	Tube furnace set to 0
12/23/2010	10:41:33 AM	Helium valve closed
12/23/2010	10:41:33 AM	H2 valve closed
12/23/2010	10:41:33 AM	BCl3 valve closed
12/23/2010	10:41:33 AM	PH3 valve closed
12/23/2010	10:41:33 AM	SiCl4 pre valve closed
12/23/2010	10:41:33 AM	SiCl4 post valve closed
12/23/2010	10:41:33 AM	Main Vac valve closed
12/23/2010	10:41:33 AM	Bypass valve closed
12/23/2010	10:41:33 AM	Bubbler valve closed
12/23/2010	10:41:33 AM	Helium MFC set to  0.000000
12/23/2010	10:41:33 AM	H2 MFC set to  0.000000
12/23/2010	10:41:33 AM	BCl3 MFC set to  0.000000
12/23/2010	10:41:33 AM	PHl3 MFC set to  0.000000
12/23/2010	10:41:33 AM	SiCl4 MFC set to  0.000000
12/23/2010	10:41:33 AM	Bypass solenoid MFC set to  0.000000
12/23/2010	10:41:33 AM	Tube furnace set to 0
12/23/2010	10:41:33 AM	Run finished at 10:41 AM
12/23/2010	10:53:37 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/23/2010	10:53:38 AM	Recipe started at 10:53 AM
12/23/2010	10:53:38 AM	Helium valve closed
12/23/2010	10:53:38 AM	H2 valve closed
12/23/2010	10:53:38 AM	BCl3 valve closed
12/23/2010	10:53:38 AM	PH3 valve closed
12/23/2010	10:53:38 AM	SiCl4 pre valve closed
12/23/2010	10:53:38 AM	SiCl4 post valve closed
12/23/2010	10:53:38 AM	Main Vac valve closed
12/23/2010	10:53:38 AM	Bubbler valve closed
12/23/2010	10:53:38 AM	Bypass valve opened
12/23/2010	10:53:38 AM	Helium MFC set to  0.000000
12/23/2010	10:53:38 AM	H2 MFC set to  0.000000
12/23/2010	10:53:38 AM	BCl3 MFC set to  0.000000
12/23/2010	10:53:38 AM	PHl3 MFC set to  0.000000
12/23/2010	10:53:38 AM	SiCl4 MFC set to  0.000000
12/23/2010	10:53:38 AM	Bypass solenoid MFC set to  0.000000
12/23/2010	10:53:38 AM	Tube furnace set to 0
12/23/2010	10:54:35 AM	Helium valve closed
12/23/2010	10:54:35 AM	H2 valve closed
12/23/2010	10:54:35 AM	BCl3 valve closed
12/23/2010	10:54:35 AM	PH3 valve closed
12/23/2010	10:54:35 AM	SiCl4 pre valve closed
12/23/2010	10:54:35 AM	SiCl4 post valve closed
12/23/2010	10:54:35 AM	Bubbler valve closed
12/23/2010	10:54:35 AM	Main Vac valve opened
12/23/2010	10:54:35 AM	Bypass valve opened
12/23/2010	10:54:35 AM	Helium MFC set to  0.000000
12/23/2010	10:54:35 AM	H2 MFC set to  0.000000
12/23/2010	10:54:35 AM	BCl3 MFC set to  0.000000
12/23/2010	10:54:35 AM	PHl3 MFC set to  0.000000
12/23/2010	10:54:35 AM	SiCl4 MFC set to  0.000000
12/23/2010	10:54:35 AM	Bypass solenoid MFC set to  0.000000
12/23/2010	10:54:35 AM	Tube furnace set to 0
12/23/2010	10:54:35 AM	Run finished at 10:54 AM
12/23/2010	10:54:35 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/23/2010	10:54:41 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/23/2010	10:54:53 AM	Recipe started at 10:54 AM
12/23/2010	10:54:53 AM	Helium valve closed
12/23/2010	10:54:53 AM	H2 valve closed
12/23/2010	10:54:53 AM	BCl3 valve closed
12/23/2010	10:54:53 AM	PH3 valve closed
12/23/2010	10:54:53 AM	SiCl4 pre valve closed
12/23/2010	10:54:53 AM	SiCl4 post valve closed
12/23/2010	10:54:53 AM	Main Vac valve closed
12/23/2010	10:54:53 AM	Bubbler valve closed
12/23/2010	10:54:53 AM	Bypass valve opened
12/23/2010	10:54:53 AM	Helium MFC set to  0.000000
12/23/2010	10:54:53 AM	H2 MFC set to  0.000000
12/23/2010	10:54:53 AM	BCl3 MFC set to  0.000000
12/23/2010	10:54:53 AM	PHl3 MFC set to  0.000000
12/23/2010	10:54:53 AM	SiCl4 MFC set to  0.000000
12/23/2010	10:54:53 AM	Bypass solenoid MFC set to  0.000000
12/23/2010	10:54:54 AM	Tube furnace set to 0
12/23/2010	10:54:54 AM	Helium valve closed
12/23/2010	10:54:54 AM	H2 valve closed
12/23/2010	10:54:54 AM	BCl3 valve closed
12/23/2010	10:54:54 AM	PH3 valve closed
12/23/2010	10:54:54 AM	SiCl4 pre valve closed
12/23/2010	10:54:54 AM	SiCl4 post valve closed
12/23/2010	10:54:54 AM	Bubbler valve closed
12/23/2010	10:54:54 AM	Main Vac valve opened
12/23/2010	10:54:54 AM	Bypass valve opened
12/23/2010	10:54:54 AM	Helium MFC set to  0.000000
12/23/2010	10:54:54 AM	H2 MFC set to  0.000000
12/23/2010	10:54:54 AM	BCl3 MFC set to  0.000000
12/23/2010	10:54:54 AM	PHl3 MFC set to  0.000000
12/23/2010	10:54:54 AM	SiCl4 MFC set to  0.000000
12/23/2010	10:54:54 AM	Bypass solenoid MFC set to  0.000000
12/23/2010	10:54:54 AM	Tube furnace set to 0
12/23/2010	10:55:54 AM	H2 valve closed
12/23/2010	10:55:54 AM	BCl3 valve closed
12/23/2010	10:55:54 AM	PH3 valve closed
12/23/2010	10:55:54 AM	SiCl4 pre valve closed
12/23/2010	10:55:54 AM	SiCl4 post valve closed
12/23/2010	10:55:54 AM	Bubbler valve closed
12/23/2010	10:55:54 AM	Helium valve opened
12/23/2010	10:55:54 AM	Main Vac valve opened
12/23/2010	10:55:54 AM	Bypass valve opened
12/23/2010	10:55:54 AM	Helium MFC set to  100.000000
12/23/2010	10:55:54 AM	H2 MFC set to  0.000000
12/23/2010	10:55:54 AM	BCl3 MFC set to  0.000000
12/23/2010	10:55:54 AM	PHl3 MFC set to  0.000000
12/23/2010	10:55:54 AM	SiCl4 MFC set to  0.000000
12/23/2010	10:55:54 AM	Bypass solenoid MFC set to  0.000000
12/23/2010	10:55:54 AM	Tube furnace set to 0
12/23/2010	10:56:54 AM	Helium valve closed
12/23/2010	10:56:54 AM	H2 valve closed
12/23/2010	10:56:54 AM	BCl3 valve closed
12/23/2010	10:56:54 AM	PH3 valve closed
12/23/2010	10:56:54 AM	SiCl4 pre valve closed
12/23/2010	10:56:54 AM	SiCl4 post valve closed
12/23/2010	10:56:54 AM	Bubbler valve closed
12/23/2010	10:56:54 AM	Main Vac valve opened
12/23/2010	10:56:54 AM	Bypass valve opened
12/23/2010	10:56:54 AM	Helium MFC set to  0.000000
12/23/2010	10:56:54 AM	H2 MFC set to  0.000000
12/23/2010	10:56:54 AM	BCl3 MFC set to  0.000000
12/23/2010	10:56:54 AM	PHl3 MFC set to  0.000000
12/23/2010	10:56:54 AM	SiCl4 MFC set to  0.000000
12/23/2010	10:56:54 AM	Bypass solenoid MFC set to  0.000000
12/23/2010	10:56:54 AM	Tube furnace set to 0
12/23/2010	10:57:54 AM	H2 valve closed
12/23/2010	10:57:54 AM	BCl3 valve closed
12/23/2010	10:57:54 AM	PH3 valve closed
12/23/2010	10:57:54 AM	SiCl4 pre valve closed
12/23/2010	10:57:54 AM	SiCl4 post valve closed
12/23/2010	10:57:54 AM	Bubbler valve closed
12/23/2010	10:57:54 AM	Helium valve opened
12/23/2010	10:57:54 AM	Main Vac valve opened
12/23/2010	10:57:54 AM	Bypass valve opened
12/23/2010	10:57:54 AM	Helium MFC set to  100.000000
12/23/2010	10:57:54 AM	H2 MFC set to  0.000000
12/23/2010	10:57:54 AM	BCl3 MFC set to  0.000000
12/23/2010	10:57:54 AM	PHl3 MFC set to  0.000000
12/23/2010	10:57:54 AM	SiCl4 MFC set to  0.000000
12/23/2010	10:57:54 AM	Bypass solenoid MFC set to  0.000000
12/23/2010	10:57:55 AM	Tube furnace set to 0
12/23/2010	10:58:55 AM	Helium valve closed
12/23/2010	10:58:55 AM	H2 valve closed
12/23/2010	10:58:55 AM	BCl3 valve closed
12/23/2010	10:58:55 AM	PH3 valve closed
12/23/2010	10:58:55 AM	SiCl4 pre valve closed
12/23/2010	10:58:55 AM	SiCl4 post valve closed
12/23/2010	10:58:55 AM	Bubbler valve closed
12/23/2010	10:58:55 AM	Main Vac valve opened
12/23/2010	10:58:55 AM	Bypass valve opened
12/23/2010	10:58:55 AM	Helium MFC set to  0.000000
12/23/2010	10:58:55 AM	H2 MFC set to  0.000000
12/23/2010	10:58:55 AM	BCl3 MFC set to  0.000000
12/23/2010	10:58:55 AM	PHl3 MFC set to  0.000000
12/23/2010	10:58:55 AM	SiCl4 MFC set to  0.000000
12/23/2010	10:58:55 AM	Bypass solenoid MFC set to  0.000000
12/23/2010	10:58:55 AM	Tube furnace set to 0
12/23/2010	10:59:55 AM	H2 valve closed
12/23/2010	10:59:55 AM	BCl3 valve closed
12/23/2010	10:59:55 AM	PH3 valve closed
12/23/2010	10:59:55 AM	SiCl4 pre valve closed
12/23/2010	10:59:55 AM	SiCl4 post valve closed
12/23/2010	10:59:55 AM	Bubbler valve closed
12/23/2010	10:59:55 AM	Helium valve opened
12/23/2010	10:59:55 AM	Main Vac valve opened
12/23/2010	10:59:55 AM	Bypass valve opened
12/23/2010	10:59:55 AM	Helium MFC set to  100.000000
12/23/2010	10:59:55 AM	H2 MFC set to  0.000000
12/23/2010	10:59:55 AM	BCl3 MFC set to  0.000000
12/23/2010	10:59:55 AM	PHl3 MFC set to  0.000000
12/23/2010	10:59:55 AM	SiCl4 MFC set to  0.000000
12/23/2010	10:59:55 AM	Bypass solenoid MFC set to  0.000000
12/23/2010	10:59:55 AM	Tube furnace set to 0
12/23/2010	11:00:55 AM	Helium valve closed
12/23/2010	11:00:55 AM	H2 valve closed
12/23/2010	11:00:55 AM	BCl3 valve closed
12/23/2010	11:00:55 AM	PH3 valve closed
12/23/2010	11:00:55 AM	SiCl4 pre valve closed
12/23/2010	11:00:55 AM	SiCl4 post valve closed
12/23/2010	11:00:55 AM	Bubbler valve closed
12/23/2010	11:00:55 AM	Main Vac valve opened
12/23/2010	11:00:55 AM	Bypass valve opened
12/23/2010	11:00:55 AM	Helium MFC set to  0.000000
12/23/2010	11:00:55 AM	H2 MFC set to  0.000000
12/23/2010	11:00:55 AM	BCl3 MFC set to  0.000000
12/23/2010	11:00:55 AM	PHl3 MFC set to  0.000000
12/23/2010	11:00:55 AM	SiCl4 MFC set to  0.000000
12/23/2010	11:00:55 AM	Bypass solenoid MFC set to  0.000000
12/23/2010	11:00:55 AM	Tube furnace set to 0
12/23/2010	11:01:55 AM	H2 valve closed
12/23/2010	11:01:55 AM	BCl3 valve closed
12/23/2010	11:01:55 AM	PH3 valve closed
12/23/2010	11:01:55 AM	SiCl4 pre valve closed
12/23/2010	11:01:55 AM	SiCl4 post valve closed
12/23/2010	11:01:55 AM	Bubbler valve closed
12/23/2010	11:01:55 AM	Helium valve opened
12/23/2010	11:01:55 AM	Main Vac valve opened
12/23/2010	11:01:55 AM	Bypass valve opened
12/23/2010	11:01:55 AM	Helium MFC set to  100.000000
12/23/2010	11:01:55 AM	H2 MFC set to  0.000000
12/23/2010	11:01:55 AM	BCl3 MFC set to  0.000000
12/23/2010	11:01:55 AM	PHl3 MFC set to  0.000000
12/23/2010	11:01:55 AM	SiCl4 MFC set to  0.000000
12/23/2010	11:01:55 AM	Bypass solenoid MFC set to  0.000000
12/23/2010	11:01:55 AM	Tube furnace set to 0
12/23/2010	11:02:55 AM	Helium valve closed
12/23/2010	11:02:55 AM	H2 valve closed
12/23/2010	11:02:55 AM	BCl3 valve closed
12/23/2010	11:02:55 AM	PH3 valve closed
12/23/2010	11:02:55 AM	SiCl4 pre valve closed
12/23/2010	11:02:55 AM	SiCl4 post valve closed
12/23/2010	11:02:55 AM	Bubbler valve closed
12/23/2010	11:02:55 AM	Main Vac valve opened
12/23/2010	11:02:55 AM	Bypass valve opened
12/23/2010	11:02:55 AM	Helium MFC set to  0.000000
12/23/2010	11:02:55 AM	H2 MFC set to  0.000000
12/23/2010	11:02:55 AM	BCl3 MFC set to  0.000000
12/23/2010	11:02:55 AM	PHl3 MFC set to  0.000000
12/23/2010	11:02:55 AM	SiCl4 MFC set to  0.000000
12/23/2010	11:02:55 AM	Bypass solenoid MFC set to  0.000000
12/23/2010	11:02:56 AM	Tube furnace set to 0
12/23/2010	11:03:56 AM	H2 valve closed
12/23/2010	11:03:56 AM	BCl3 valve closed
12/23/2010	11:03:56 AM	PH3 valve closed
12/23/2010	11:03:56 AM	SiCl4 pre valve closed
12/23/2010	11:03:56 AM	SiCl4 post valve closed
12/23/2010	11:03:56 AM	Bubbler valve closed
12/23/2010	11:03:56 AM	Helium valve opened
12/23/2010	11:03:56 AM	Main Vac valve opened
12/23/2010	11:03:56 AM	Bypass valve opened
12/23/2010	11:03:56 AM	Helium MFC set to  100.000000
12/23/2010	11:03:56 AM	H2 MFC set to  0.000000
12/23/2010	11:03:56 AM	BCl3 MFC set to  0.000000
12/23/2010	11:03:56 AM	PHl3 MFC set to  0.000000
12/23/2010	11:03:56 AM	SiCl4 MFC set to  0.000000
12/23/2010	11:03:56 AM	Bypass solenoid MFC set to  0.000000
12/23/2010	11:03:56 AM	Tube furnace set to 0
12/23/2010	11:04:56 AM	Helium valve closed
12/23/2010	11:04:56 AM	H2 valve closed
12/23/2010	11:04:56 AM	BCl3 valve closed
12/23/2010	11:04:56 AM	PH3 valve closed
12/23/2010	11:04:56 AM	SiCl4 pre valve closed
12/23/2010	11:04:56 AM	SiCl4 post valve closed
12/23/2010	11:04:56 AM	Bubbler valve closed
12/23/2010	11:04:56 AM	Main Vac valve opened
12/23/2010	11:04:56 AM	Bypass valve opened
12/23/2010	11:04:56 AM	Helium MFC set to  0.000000
12/23/2010	11:04:56 AM	H2 MFC set to  0.000000
12/23/2010	11:04:56 AM	BCl3 MFC set to  0.000000
12/23/2010	11:04:56 AM	PHl3 MFC set to  0.000000
12/23/2010	11:04:56 AM	SiCl4 MFC set to  0.000000
12/23/2010	11:04:56 AM	Bypass solenoid MFC set to  0.000000
12/23/2010	11:04:56 AM	Tube furnace set to 0
12/23/2010	11:05:56 AM	H2 valve closed
12/23/2010	11:05:56 AM	BCl3 valve closed
12/23/2010	11:05:56 AM	PH3 valve closed
12/23/2010	11:05:56 AM	SiCl4 pre valve closed
12/23/2010	11:05:56 AM	SiCl4 post valve closed
12/23/2010	11:05:56 AM	Bubbler valve closed
12/23/2010	11:05:56 AM	Helium valve opened
12/23/2010	11:05:56 AM	Main Vac valve opened
12/23/2010	11:05:56 AM	Bypass valve opened
12/23/2010	11:05:56 AM	Helium MFC set to  100.000000
12/23/2010	11:05:56 AM	H2 MFC set to  0.000000
12/23/2010	11:05:56 AM	BCl3 MFC set to  0.000000
12/23/2010	11:05:56 AM	PHl3 MFC set to  0.000000
12/23/2010	11:05:56 AM	SiCl4 MFC set to  0.000000
12/23/2010	11:05:56 AM	Bypass solenoid MFC set to  0.000000
12/23/2010	11:05:56 AM	Tube furnace set to 0
12/23/2010	11:06:56 AM	Helium valve closed
12/23/2010	11:06:56 AM	H2 valve closed
12/23/2010	11:06:56 AM	BCl3 valve closed
12/23/2010	11:06:56 AM	PH3 valve closed
12/23/2010	11:06:56 AM	SiCl4 pre valve closed
12/23/2010	11:06:56 AM	SiCl4 post valve closed
12/23/2010	11:06:56 AM	Bubbler valve closed
12/23/2010	11:06:56 AM	Main Vac valve opened
12/23/2010	11:06:56 AM	Bypass valve opened
12/23/2010	11:06:56 AM	Helium MFC set to  0.000000
12/23/2010	11:06:56 AM	H2 MFC set to  0.000000
12/23/2010	11:06:56 AM	BCl3 MFC set to  0.000000
12/23/2010	11:06:56 AM	PHl3 MFC set to  0.000000
12/23/2010	11:06:56 AM	SiCl4 MFC set to  0.000000
12/23/2010	11:06:56 AM	Bypass solenoid MFC set to  0.000000
12/23/2010	11:06:56 AM	Tube furnace set to 0
12/23/2010	11:07:56 AM	H2 valve closed
12/23/2010	11:07:56 AM	BCl3 valve closed
12/23/2010	11:07:56 AM	PH3 valve closed
12/23/2010	11:07:56 AM	SiCl4 pre valve closed
12/23/2010	11:07:56 AM	SiCl4 post valve closed
12/23/2010	11:07:56 AM	Bubbler valve closed
12/23/2010	11:07:56 AM	Helium valve opened
12/23/2010	11:07:56 AM	Main Vac valve opened
12/23/2010	11:07:56 AM	Bypass valve opened
12/23/2010	11:07:56 AM	Helium MFC set to  100.000000
12/23/2010	11:07:56 AM	H2 MFC set to  0.000000
12/23/2010	11:07:56 AM	BCl3 MFC set to  0.000000
12/23/2010	11:07:56 AM	PHl3 MFC set to  0.000000
12/23/2010	11:07:56 AM	SiCl4 MFC set to  0.000000
12/23/2010	11:07:56 AM	Bypass solenoid MFC set to  0.000000
12/23/2010	11:07:57 AM	Tube furnace set to 0
12/23/2010	11:08:57 AM	Helium valve closed
12/23/2010	11:08:57 AM	H2 valve closed
12/23/2010	11:08:57 AM	BCl3 valve closed
12/23/2010	11:08:57 AM	PH3 valve closed
12/23/2010	11:08:57 AM	SiCl4 pre valve closed
12/23/2010	11:08:57 AM	SiCl4 post valve closed
12/23/2010	11:08:57 AM	Bubbler valve closed
12/23/2010	11:08:57 AM	Main Vac valve opened
12/23/2010	11:08:57 AM	Bypass valve opened
12/23/2010	11:08:57 AM	Helium MFC set to  0.000000
12/23/2010	11:08:57 AM	H2 MFC set to  0.000000
12/23/2010	11:08:57 AM	BCl3 MFC set to  0.000000
12/23/2010	11:08:57 AM	PHl3 MFC set to  0.000000
12/23/2010	11:08:57 AM	SiCl4 MFC set to  0.000000
12/23/2010	11:08:57 AM	Bypass solenoid MFC set to  0.000000
12/23/2010	11:08:57 AM	Tube furnace set to 0
12/23/2010	11:09:57 AM	H2 valve closed
12/23/2010	11:09:57 AM	BCl3 valve closed
12/23/2010	11:09:57 AM	PH3 valve closed
12/23/2010	11:09:57 AM	SiCl4 pre valve closed
12/23/2010	11:09:57 AM	SiCl4 post valve closed
12/23/2010	11:09:57 AM	Bubbler valve closed
12/23/2010	11:09:57 AM	Helium valve opened
12/23/2010	11:09:57 AM	Main Vac valve opened
12/23/2010	11:09:57 AM	Bypass valve opened
12/23/2010	11:09:57 AM	Helium MFC set to  100.000000
12/23/2010	11:09:57 AM	H2 MFC set to  0.000000
12/23/2010	11:09:57 AM	BCl3 MFC set to  0.000000
12/23/2010	11:09:57 AM	PHl3 MFC set to  0.000000
12/23/2010	11:09:57 AM	SiCl4 MFC set to  0.000000
12/23/2010	11:09:57 AM	Bypass solenoid MFC set to  0.000000
12/23/2010	11:09:57 AM	Tube furnace set to 0
12/23/2010	11:10:57 AM	Helium valve closed
12/23/2010	11:10:57 AM	H2 valve closed
12/23/2010	11:10:57 AM	BCl3 valve closed
12/23/2010	11:10:57 AM	PH3 valve closed
12/23/2010	11:10:57 AM	SiCl4 pre valve closed
12/23/2010	11:10:57 AM	SiCl4 post valve closed
12/23/2010	11:10:57 AM	Bubbler valve closed
12/23/2010	11:10:57 AM	Main Vac valve opened
12/23/2010	11:10:57 AM	Bypass valve opened
12/23/2010	11:10:57 AM	Helium MFC set to  0.000000
12/23/2010	11:10:57 AM	H2 MFC set to  0.000000
12/23/2010	11:10:57 AM	BCl3 MFC set to  0.000000
12/23/2010	11:10:57 AM	PHl3 MFC set to  0.000000
12/23/2010	11:10:57 AM	SiCl4 MFC set to  0.000000
12/23/2010	11:10:57 AM	Bypass solenoid MFC set to  0.000000
12/23/2010	11:10:57 AM	Tube furnace set to 0
12/23/2010	11:11:57 AM	H2 valve closed
12/23/2010	11:11:57 AM	BCl3 valve closed
12/23/2010	11:11:57 AM	PH3 valve closed
12/23/2010	11:11:57 AM	SiCl4 pre valve closed
12/23/2010	11:11:57 AM	SiCl4 post valve closed
12/23/2010	11:11:57 AM	Bubbler valve closed
12/23/2010	11:11:57 AM	Helium valve opened
12/23/2010	11:11:57 AM	Main Vac valve opened
12/23/2010	11:11:57 AM	Bypass valve opened
12/23/2010	11:11:57 AM	Helium MFC set to  100.000000
12/23/2010	11:11:57 AM	H2 MFC set to  0.000000
12/23/2010	11:11:57 AM	BCl3 MFC set to  0.000000
12/23/2010	11:11:57 AM	PHl3 MFC set to  0.000000
12/23/2010	11:11:57 AM	SiCl4 MFC set to  0.000000
12/23/2010	11:11:57 AM	Bypass solenoid MFC set to  0.000000
12/23/2010	11:11:57 AM	Tube furnace set to 0
12/23/2010	11:12:57 AM	Helium valve closed
12/23/2010	11:12:57 AM	H2 valve closed
12/23/2010	11:12:57 AM	BCl3 valve closed
12/23/2010	11:12:57 AM	PH3 valve closed
12/23/2010	11:12:57 AM	SiCl4 pre valve closed
12/23/2010	11:12:57 AM	SiCl4 post valve closed
12/23/2010	11:12:57 AM	Bubbler valve closed
12/23/2010	11:12:57 AM	Main Vac valve opened
12/23/2010	11:12:57 AM	Bypass valve opened
12/23/2010	11:12:57 AM	Helium MFC set to  0.000000
12/23/2010	11:12:57 AM	H2 MFC set to  0.000000
12/23/2010	11:12:58 AM	BCl3 MFC set to  0.000000
12/23/2010	11:12:58 AM	PHl3 MFC set to  0.000000
12/23/2010	11:12:58 AM	SiCl4 MFC set to  0.000000
12/23/2010	11:12:58 AM	Bypass solenoid MFC set to  0.000000
12/23/2010	11:12:58 AM	Tube furnace set to 0
12/23/2010	11:13:58 AM	H2 valve closed
12/23/2010	11:13:58 AM	BCl3 valve closed
12/23/2010	11:13:58 AM	PH3 valve closed
12/23/2010	11:13:58 AM	SiCl4 pre valve closed
12/23/2010	11:13:58 AM	SiCl4 post valve closed
12/23/2010	11:13:58 AM	Bubbler valve closed
12/23/2010	11:13:58 AM	Helium valve opened
12/23/2010	11:13:58 AM	Main Vac valve opened
12/23/2010	11:13:58 AM	Bypass valve opened
12/23/2010	11:13:58 AM	Helium MFC set to  100.000000
12/23/2010	11:13:58 AM	H2 MFC set to  0.000000
12/23/2010	11:13:58 AM	BCl3 MFC set to  0.000000
12/23/2010	11:13:58 AM	PHl3 MFC set to  0.000000
12/23/2010	11:13:58 AM	SiCl4 MFC set to  0.000000
12/23/2010	11:13:58 AM	Bypass solenoid MFC set to  0.000000
12/23/2010	11:13:58 AM	Tube furnace set to 0
12/23/2010	11:14:58 AM	Helium valve closed
12/23/2010	11:14:58 AM	H2 valve closed
12/23/2010	11:14:58 AM	BCl3 valve closed
12/23/2010	11:14:58 AM	PH3 valve closed
12/23/2010	11:14:58 AM	SiCl4 pre valve closed
12/23/2010	11:14:58 AM	SiCl4 post valve closed
12/23/2010	11:14:58 AM	Bubbler valve closed
12/23/2010	11:14:58 AM	Main Vac valve opened
12/23/2010	11:14:58 AM	Bypass valve opened
12/23/2010	11:14:58 AM	Helium MFC set to  0.000000
12/23/2010	11:14:58 AM	H2 MFC set to  0.000000
12/23/2010	11:14:58 AM	BCl3 MFC set to  0.000000
12/23/2010	11:14:58 AM	PHl3 MFC set to  0.000000
12/23/2010	11:14:58 AM	SiCl4 MFC set to  0.000000
12/23/2010	11:14:58 AM	Bypass solenoid MFC set to  0.000000
12/23/2010	11:14:58 AM	Tube furnace set to 0
12/23/2010	11:14:59 AM	Run finished at 11:14 AM
12/23/2010	11:14:59 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/23/2010	12:18:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/23/2010	12:18:44 PM	Recipe started at 12:18 PM
12/23/2010	12:18:44 PM	Helium valve closed
12/23/2010	12:18:44 PM	H2 valve closed
12/23/2010	12:18:44 PM	BCl3 valve closed
12/23/2010	12:18:44 PM	PH3 valve closed
12/23/2010	12:18:44 PM	SiCl4 pre valve closed
12/23/2010	12:18:44 PM	SiCl4 post valve closed
12/23/2010	12:18:44 PM	Main Vac valve closed
12/23/2010	12:18:44 PM	Bubbler valve closed
12/23/2010	12:18:44 PM	Bypass valve opened
12/23/2010	12:18:44 PM	Helium MFC set to  0.000000
12/23/2010	12:18:44 PM	H2 MFC set to  0.000000
12/23/2010	12:18:44 PM	BCl3 MFC set to  0.000000
12/23/2010	12:18:44 PM	PHl3 MFC set to  0.000000
12/23/2010	12:18:44 PM	SiCl4 MFC set to  0.000000
12/23/2010	12:18:44 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	12:18:44 PM	Tube furnace set to 0
12/23/2010	12:18:44 PM	Helium valve closed
12/23/2010	12:18:44 PM	H2 valve closed
12/23/2010	12:18:44 PM	BCl3 valve closed
12/23/2010	12:18:44 PM	PH3 valve closed
12/23/2010	12:18:44 PM	SiCl4 pre valve closed
12/23/2010	12:18:44 PM	SiCl4 post valve closed
12/23/2010	12:18:44 PM	Bubbler valve closed
12/23/2010	12:18:44 PM	Main Vac valve opened
12/23/2010	12:18:44 PM	Bypass valve opened
12/23/2010	12:18:44 PM	Helium MFC set to  0.000000
12/23/2010	12:18:44 PM	H2 MFC set to  0.000000
12/23/2010	12:18:44 PM	BCl3 MFC set to  0.000000
12/23/2010	12:18:44 PM	PHl3 MFC set to  0.000000
12/23/2010	12:18:44 PM	SiCl4 MFC set to  0.000000
12/23/2010	12:18:44 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	12:18:44 PM	Tube furnace set to 0
12/23/2010	12:19:44 PM	H2 valve closed
12/23/2010	12:19:44 PM	BCl3 valve closed
12/23/2010	12:19:44 PM	PH3 valve closed
12/23/2010	12:19:44 PM	SiCl4 pre valve closed
12/23/2010	12:19:44 PM	SiCl4 post valve closed
12/23/2010	12:19:44 PM	Bubbler valve closed
12/23/2010	12:19:44 PM	Helium valve opened
12/23/2010	12:19:44 PM	Main Vac valve opened
12/23/2010	12:19:44 PM	Bypass valve opened
12/23/2010	12:19:44 PM	Helium MFC set to  100.000000
12/23/2010	12:19:44 PM	H2 MFC set to  0.000000
12/23/2010	12:19:44 PM	BCl3 MFC set to  0.000000
12/23/2010	12:19:44 PM	PHl3 MFC set to  0.000000
12/23/2010	12:19:44 PM	SiCl4 MFC set to  0.000000
12/23/2010	12:19:44 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	12:19:44 PM	Tube furnace set to 0
12/23/2010	12:20:44 PM	Helium valve closed
12/23/2010	12:20:44 PM	H2 valve closed
12/23/2010	12:20:44 PM	BCl3 valve closed
12/23/2010	12:20:44 PM	PH3 valve closed
12/23/2010	12:20:44 PM	SiCl4 pre valve closed
12/23/2010	12:20:44 PM	SiCl4 post valve closed
12/23/2010	12:20:44 PM	Bubbler valve closed
12/23/2010	12:20:44 PM	Main Vac valve opened
12/23/2010	12:20:44 PM	Bypass valve opened
12/23/2010	12:20:44 PM	Helium MFC set to  0.000000
12/23/2010	12:20:44 PM	H2 MFC set to  0.000000
12/23/2010	12:20:44 PM	BCl3 MFC set to  0.000000
12/23/2010	12:20:44 PM	PHl3 MFC set to  0.000000
12/23/2010	12:20:44 PM	SiCl4 MFC set to  0.000000
12/23/2010	12:20:44 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	12:20:45 PM	Tube furnace set to 0
12/23/2010	12:21:45 PM	H2 valve closed
12/23/2010	12:21:45 PM	BCl3 valve closed
12/23/2010	12:21:45 PM	PH3 valve closed
12/23/2010	12:21:45 PM	SiCl4 pre valve closed
12/23/2010	12:21:45 PM	SiCl4 post valve closed
12/23/2010	12:21:45 PM	Bubbler valve closed
12/23/2010	12:21:45 PM	Helium valve opened
12/23/2010	12:21:45 PM	Main Vac valve opened
12/23/2010	12:21:45 PM	Bypass valve opened
12/23/2010	12:21:45 PM	Helium MFC set to  100.000000
12/23/2010	12:21:45 PM	H2 MFC set to  0.000000
12/23/2010	12:21:45 PM	BCl3 MFC set to  0.000000
12/23/2010	12:21:45 PM	PHl3 MFC set to  0.000000
12/23/2010	12:21:45 PM	SiCl4 MFC set to  0.000000
12/23/2010	12:21:45 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	12:21:45 PM	Tube furnace set to 0
12/23/2010	12:22:45 PM	Helium valve closed
12/23/2010	12:22:45 PM	H2 valve closed
12/23/2010	12:22:45 PM	BCl3 valve closed
12/23/2010	12:22:45 PM	PH3 valve closed
12/23/2010	12:22:45 PM	SiCl4 pre valve closed
12/23/2010	12:22:45 PM	SiCl4 post valve closed
12/23/2010	12:22:45 PM	Bubbler valve closed
12/23/2010	12:22:45 PM	Main Vac valve opened
12/23/2010	12:22:45 PM	Bypass valve opened
12/23/2010	12:22:45 PM	Helium MFC set to  0.000000
12/23/2010	12:22:45 PM	H2 MFC set to  0.000000
12/23/2010	12:22:45 PM	BCl3 MFC set to  0.000000
12/23/2010	12:22:45 PM	PHl3 MFC set to  0.000000
12/23/2010	12:22:45 PM	SiCl4 MFC set to  0.000000
12/23/2010	12:22:45 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	12:22:45 PM	Tube furnace set to 0
12/23/2010	12:22:51 PM	Run aborted at 12:22 PM
12/23/2010	12:22:51 PM	Helium valve closed
12/23/2010	12:22:51 PM	H2 valve closed
12/23/2010	12:22:51 PM	BCl3 valve closed
12/23/2010	12:22:51 PM	PH3 valve closed
12/23/2010	12:22:51 PM	SiCl4 pre valve closed
12/23/2010	12:22:51 PM	SiCl4 post valve closed
12/23/2010	12:22:51 PM	Bypass valve closed
12/23/2010	12:22:52 PM	Main Vac valve closed
12/23/2010	12:22:52 PM	Bubbler valve closed
12/23/2010	12:22:52 PM	Helium MFC set to  0.000000
12/23/2010	12:22:52 PM	H2 MFC set to  0.000000
12/23/2010	12:22:52 PM	BCl3 MFC set to  0.000000
12/23/2010	12:22:52 PM	PHl3 MFC set to  0.000000
12/23/2010	12:22:52 PM	SiCl4 MFC set to  0.000000
12/23/2010	12:22:52 PM	Tube furnace set to 0
12/23/2010	12:22:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/23/2010	12:22:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/23/2010	12:22:53 PM	Recipe started at 12:22 PM
12/23/2010	12:22:53 PM	Helium valve closed
12/23/2010	12:22:53 PM	H2 valve closed
12/23/2010	12:22:53 PM	BCl3 valve closed
12/23/2010	12:22:53 PM	PH3 valve closed
12/23/2010	12:22:53 PM	SiCl4 pre valve closed
12/23/2010	12:22:53 PM	SiCl4 post valve closed
12/23/2010	12:22:53 PM	Main Vac valve closed
12/23/2010	12:22:53 PM	Bubbler valve closed
12/23/2010	12:22:53 PM	Bypass valve opened
12/23/2010	12:22:53 PM	Helium MFC set to  0.000000
12/23/2010	12:22:53 PM	H2 MFC set to  0.000000
12/23/2010	12:22:53 PM	BCl3 MFC set to  0.000000
12/23/2010	12:22:53 PM	PHl3 MFC set to  0.000000
12/23/2010	12:22:53 PM	SiCl4 MFC set to  0.000000
12/23/2010	12:22:53 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	12:22:53 PM	Tube furnace set to 0
12/23/2010	12:22:53 PM	Helium valve closed
12/23/2010	12:22:53 PM	H2 valve closed
12/23/2010	12:22:53 PM	BCl3 valve closed
12/23/2010	12:22:53 PM	PH3 valve closed
12/23/2010	12:22:53 PM	SiCl4 pre valve closed
12/23/2010	12:22:53 PM	SiCl4 post valve closed
12/23/2010	12:22:53 PM	Bubbler valve closed
12/23/2010	12:22:53 PM	Main Vac valve opened
12/23/2010	12:22:53 PM	Bypass valve opened
12/23/2010	12:22:53 PM	Helium MFC set to  0.000000
12/23/2010	12:22:53 PM	H2 MFC set to  0.000000
12/23/2010	12:22:53 PM	BCl3 MFC set to  0.000000
12/23/2010	12:22:53 PM	PHl3 MFC set to  0.000000
12/23/2010	12:22:53 PM	SiCl4 MFC set to  0.000000
12/23/2010	12:22:53 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	12:22:54 PM	Tube furnace set to 0
12/23/2010	12:22:54 PM	Run finished at 12:22 PM
12/23/2010	12:22:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/23/2010	12:23:37 PM	Recipe started at 12:23 PM
12/23/2010	12:23:37 PM	Helium valve closed
12/23/2010	12:23:37 PM	BCl3 valve closed
12/23/2010	12:23:37 PM	PH3 valve closed
12/23/2010	12:23:37 PM	SiCl4 pre valve closed
12/23/2010	12:23:37 PM	SiCl4 post valve closed
12/23/2010	12:23:37 PM	Main Vac valve closed
12/23/2010	12:23:37 PM	Bypass valve closed
12/23/2010	12:23:37 PM	Bubbler valve closed
12/23/2010	12:23:37 PM	H2 valve opened
12/23/2010	12:23:37 PM	Helium MFC set to  0.000000
12/23/2010	12:23:37 PM	H2 MFC set to  500.000000
12/23/2010	12:23:37 PM	BCl3 MFC set to  0.000000
12/23/2010	12:23:37 PM	PHl3 MFC set to  0.000000
12/23/2010	12:23:37 PM	SiCl4 MFC set to  0.000000
12/23/2010	12:23:37 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	12:23:38 PM	Tube furnace set to 0
12/23/2010	12:24:56 PM	Helium valve closed
12/23/2010	12:24:56 PM	BCl3 valve closed
12/23/2010	12:24:56 PM	PH3 valve closed
12/23/2010	12:24:56 PM	SiCl4 pre valve closed
12/23/2010	12:24:56 PM	SiCl4 post valve closed
12/23/2010	12:24:56 PM	Main Vac valve closed
12/23/2010	12:24:56 PM	Bypass valve closed
12/23/2010	12:24:56 PM	H2 valve opened
12/23/2010	12:24:56 PM	Bubbler valve opened
12/23/2010	12:24:56 PM	Helium MFC set to  0.000000
12/23/2010	12:24:56 PM	H2 MFC set to  500.000000
12/23/2010	12:24:56 PM	BCl3 MFC set to  0.000000
12/23/2010	12:24:56 PM	PHl3 MFC set to  0.000000
12/23/2010	12:24:56 PM	SiCl4 MFC set to  0.000000
12/23/2010	12:24:56 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	12:24:56 PM	Tube furnace set to 1000
12/23/2010	12:44:56 PM	Helium valve closed
12/23/2010	12:44:56 PM	PH3 valve closed
12/23/2010	12:44:56 PM	Main Vac valve closed
12/23/2010	12:44:56 PM	Bypass valve closed
12/23/2010	12:44:56 PM	H2 valve opened
12/23/2010	12:44:56 PM	BCl3 valve opened
12/23/2010	12:44:56 PM	SiCl4 pre valve opened
12/23/2010	12:44:56 PM	SiCl4 post valve opened
12/23/2010	12:44:56 PM	Bubbler valve opened
12/23/2010	12:44:56 PM	Helium MFC set to  0.000000
12/23/2010	12:44:56 PM	H2 MFC set to  500.000000
12/23/2010	12:44:56 PM	BCl3 MFC set to  12.000000
12/23/2010	12:44:56 PM	PHl3 MFC set to  0.000000
12/23/2010	12:44:56 PM	SiCl4 MFC set to  50.000000
12/23/2010	12:44:56 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	12:44:56 PM	Tube furnace set to 1000
12/23/2010	1:04:56 PM	H2 valve closed
12/23/2010	1:04:56 PM	BCl3 valve closed
12/23/2010	1:04:56 PM	PH3 valve closed
12/23/2010	1:04:56 PM	SiCl4 pre valve closed
12/23/2010	1:04:56 PM	SiCl4 post valve closed
12/23/2010	1:04:56 PM	Main Vac valve closed
12/23/2010	1:04:56 PM	Bypass valve closed
12/23/2010	1:04:56 PM	Helium valve opened
12/23/2010	1:04:56 PM	Bubbler valve opened
12/23/2010	1:04:56 PM	Helium MFC set to  500.000000
12/23/2010	1:04:56 PM	H2 MFC set to  0.000000
12/23/2010	1:04:56 PM	BCl3 MFC set to  0.000000
12/23/2010	1:04:56 PM	PHl3 MFC set to  0.000000
12/23/2010	1:04:56 PM	SiCl4 MFC set to  0.000000
12/23/2010	1:04:56 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	1:04:56 PM	Tube furnace set to 0
12/23/2010	1:24:56 PM	Helium valve closed
12/23/2010	1:24:56 PM	H2 valve closed
12/23/2010	1:24:56 PM	BCl3 valve closed
12/23/2010	1:24:56 PM	PH3 valve closed
12/23/2010	1:24:56 PM	SiCl4 pre valve closed
12/23/2010	1:24:56 PM	SiCl4 post valve closed
12/23/2010	1:24:56 PM	Main Vac valve closed
12/23/2010	1:24:56 PM	Bypass valve closed
12/23/2010	1:24:56 PM	Bubbler valve closed
12/23/2010	1:24:56 PM	Helium MFC set to  0.000000
12/23/2010	1:24:56 PM	H2 MFC set to  0.000000
12/23/2010	1:24:56 PM	BCl3 MFC set to  0.000000
12/23/2010	1:24:56 PM	PHl3 MFC set to  0.000000
12/23/2010	1:24:56 PM	SiCl4 MFC set to  0.000000
12/23/2010	1:24:56 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	1:24:57 PM	Tube furnace set to 0
12/23/2010	1:24:57 PM	Run finished at 1:24 PM
12/23/2010	2:34:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/23/2010	2:34:55 PM	Recipe started at 2:34 PM
12/23/2010	2:34:55 PM	Helium valve closed
12/23/2010	2:34:55 PM	H2 valve closed
12/23/2010	2:34:55 PM	BCl3 valve closed
12/23/2010	2:34:55 PM	PH3 valve closed
12/23/2010	2:34:55 PM	SiCl4 pre valve closed
12/23/2010	2:34:55 PM	SiCl4 post valve closed
12/23/2010	2:34:55 PM	Main Vac valve closed
12/23/2010	2:34:55 PM	Bubbler valve closed
12/23/2010	2:34:55 PM	Bypass valve opened
12/23/2010	2:34:55 PM	Helium MFC set to  0.000000
12/23/2010	2:34:55 PM	H2 MFC set to  0.000000
12/23/2010	2:34:55 PM	BCl3 MFC set to  0.000000
12/23/2010	2:34:55 PM	PHl3 MFC set to  0.000000
12/23/2010	2:34:55 PM	SiCl4 MFC set to  0.000000
12/23/2010	2:34:55 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	2:34:55 PM	Tube furnace set to 0
12/23/2010	2:35:52 PM	Helium valve closed
12/23/2010	2:35:52 PM	H2 valve closed
12/23/2010	2:35:52 PM	BCl3 valve closed
12/23/2010	2:35:52 PM	PH3 valve closed
12/23/2010	2:35:52 PM	SiCl4 pre valve closed
12/23/2010	2:35:52 PM	SiCl4 post valve closed
12/23/2010	2:35:52 PM	Bubbler valve closed
12/23/2010	2:35:52 PM	Main Vac valve opened
12/23/2010	2:35:52 PM	Bypass valve opened
12/23/2010	2:35:52 PM	Helium MFC set to  0.000000
12/23/2010	2:35:52 PM	H2 MFC set to  0.000000
12/23/2010	2:35:52 PM	BCl3 MFC set to  0.000000
12/23/2010	2:35:52 PM	PHl3 MFC set to  0.000000
12/23/2010	2:35:52 PM	SiCl4 MFC set to  0.000000
12/23/2010	2:35:52 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	2:35:53 PM	Tube furnace set to 0
12/23/2010	2:35:53 PM	Run finished at 2:35 PM
12/23/2010	2:35:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/23/2010	2:43:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/23/2010	2:43:50 PM	Recipe started at 2:43 PM
12/23/2010	2:43:50 PM	Helium valve closed
12/23/2010	2:43:50 PM	H2 valve closed
12/23/2010	2:43:50 PM	BCl3 valve closed
12/23/2010	2:43:50 PM	PH3 valve closed
12/23/2010	2:43:50 PM	SiCl4 pre valve closed
12/23/2010	2:43:50 PM	SiCl4 post valve closed
12/23/2010	2:43:50 PM	Main Vac valve closed
12/23/2010	2:43:50 PM	Bubbler valve closed
12/23/2010	2:43:50 PM	Bypass valve opened
12/23/2010	2:43:50 PM	Helium MFC set to  0.000000
12/23/2010	2:43:50 PM	H2 MFC set to  0.000000
12/23/2010	2:43:50 PM	BCl3 MFC set to  0.000000
12/23/2010	2:43:50 PM	PHl3 MFC set to  0.000000
12/23/2010	2:43:50 PM	SiCl4 MFC set to  0.000000
12/23/2010	2:43:50 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	2:43:50 PM	Tube furnace set to 0
12/23/2010	2:43:50 PM	Helium valve closed
12/23/2010	2:43:50 PM	H2 valve closed
12/23/2010	2:43:50 PM	BCl3 valve closed
12/23/2010	2:43:50 PM	PH3 valve closed
12/23/2010	2:43:50 PM	SiCl4 pre valve closed
12/23/2010	2:43:50 PM	SiCl4 post valve closed
12/23/2010	2:43:50 PM	Bubbler valve closed
12/23/2010	2:43:50 PM	Main Vac valve opened
12/23/2010	2:43:50 PM	Bypass valve opened
12/23/2010	2:43:50 PM	Helium MFC set to  0.000000
12/23/2010	2:43:50 PM	H2 MFC set to  0.000000
12/23/2010	2:43:50 PM	BCl3 MFC set to  0.000000
12/23/2010	2:43:50 PM	PHl3 MFC set to  0.000000
12/23/2010	2:43:50 PM	SiCl4 MFC set to  0.000000
12/23/2010	2:43:50 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	2:43:51 PM	Tube furnace set to 0
12/23/2010	2:44:51 PM	H2 valve closed
12/23/2010	2:44:51 PM	BCl3 valve closed
12/23/2010	2:44:51 PM	PH3 valve closed
12/23/2010	2:44:51 PM	SiCl4 pre valve closed
12/23/2010	2:44:51 PM	SiCl4 post valve closed
12/23/2010	2:44:51 PM	Bubbler valve closed
12/23/2010	2:44:51 PM	Helium valve opened
12/23/2010	2:44:51 PM	Main Vac valve opened
12/23/2010	2:44:51 PM	Bypass valve opened
12/23/2010	2:44:51 PM	Helium MFC set to  100.000000
12/23/2010	2:44:51 PM	H2 MFC set to  0.000000
12/23/2010	2:44:51 PM	BCl3 MFC set to  0.000000
12/23/2010	2:44:51 PM	PHl3 MFC set to  0.000000
12/23/2010	2:44:51 PM	SiCl4 MFC set to  0.000000
12/23/2010	2:44:51 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	2:44:51 PM	Tube furnace set to 0
12/23/2010	2:45:51 PM	Helium valve closed
12/23/2010	2:45:51 PM	H2 valve closed
12/23/2010	2:45:51 PM	BCl3 valve closed
12/23/2010	2:45:51 PM	PH3 valve closed
12/23/2010	2:45:51 PM	SiCl4 pre valve closed
12/23/2010	2:45:51 PM	SiCl4 post valve closed
12/23/2010	2:45:51 PM	Bubbler valve closed
12/23/2010	2:45:51 PM	Main Vac valve opened
12/23/2010	2:45:51 PM	Bypass valve opened
12/23/2010	2:45:51 PM	Helium MFC set to  0.000000
12/23/2010	2:45:51 PM	H2 MFC set to  0.000000
12/23/2010	2:45:51 PM	BCl3 MFC set to  0.000000
12/23/2010	2:45:51 PM	PHl3 MFC set to  0.000000
12/23/2010	2:45:51 PM	SiCl4 MFC set to  0.000000
12/23/2010	2:45:51 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	2:45:51 PM	Tube furnace set to 0
12/23/2010	2:46:51 PM	H2 valve closed
12/23/2010	2:46:51 PM	BCl3 valve closed
12/23/2010	2:46:51 PM	PH3 valve closed
12/23/2010	2:46:51 PM	SiCl4 pre valve closed
12/23/2010	2:46:51 PM	SiCl4 post valve closed
12/23/2010	2:46:51 PM	Bubbler valve closed
12/23/2010	2:46:51 PM	Helium valve opened
12/23/2010	2:46:51 PM	Main Vac valve opened
12/23/2010	2:46:51 PM	Bypass valve opened
12/23/2010	2:46:51 PM	Helium MFC set to  100.000000
12/23/2010	2:46:51 PM	H2 MFC set to  0.000000
12/23/2010	2:46:51 PM	BCl3 MFC set to  0.000000
12/23/2010	2:46:51 PM	PHl3 MFC set to  0.000000
12/23/2010	2:46:51 PM	SiCl4 MFC set to  0.000000
12/23/2010	2:46:51 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	2:46:51 PM	Tube furnace set to 0
12/23/2010	2:47:51 PM	Helium valve closed
12/23/2010	2:47:51 PM	H2 valve closed
12/23/2010	2:47:51 PM	BCl3 valve closed
12/23/2010	2:47:51 PM	PH3 valve closed
12/23/2010	2:47:51 PM	SiCl4 pre valve closed
12/23/2010	2:47:51 PM	SiCl4 post valve closed
12/23/2010	2:47:51 PM	Bubbler valve closed
12/23/2010	2:47:51 PM	Main Vac valve opened
12/23/2010	2:47:51 PM	Bypass valve opened
12/23/2010	2:47:51 PM	Helium MFC set to  0.000000
12/23/2010	2:47:51 PM	H2 MFC set to  0.000000
12/23/2010	2:47:51 PM	BCl3 MFC set to  0.000000
12/23/2010	2:47:51 PM	PHl3 MFC set to  0.000000
12/23/2010	2:47:51 PM	SiCl4 MFC set to  0.000000
12/23/2010	2:47:51 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	2:47:51 PM	Tube furnace set to 0
12/23/2010	2:48:51 PM	H2 valve closed
12/23/2010	2:48:51 PM	BCl3 valve closed
12/23/2010	2:48:51 PM	PH3 valve closed
12/23/2010	2:48:51 PM	SiCl4 pre valve closed
12/23/2010	2:48:51 PM	SiCl4 post valve closed
12/23/2010	2:48:51 PM	Bubbler valve closed
12/23/2010	2:48:51 PM	Helium valve opened
12/23/2010	2:48:51 PM	Main Vac valve opened
12/23/2010	2:48:51 PM	Bypass valve opened
12/23/2010	2:48:51 PM	Helium MFC set to  100.000000
12/23/2010	2:48:51 PM	H2 MFC set to  0.000000
12/23/2010	2:48:51 PM	BCl3 MFC set to  0.000000
12/23/2010	2:48:51 PM	PHl3 MFC set to  0.000000
12/23/2010	2:48:51 PM	SiCl4 MFC set to  0.000000
12/23/2010	2:48:51 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	2:48:52 PM	Tube furnace set to 0
12/23/2010	2:49:52 PM	Helium valve closed
12/23/2010	2:49:52 PM	H2 valve closed
12/23/2010	2:49:52 PM	BCl3 valve closed
12/23/2010	2:49:52 PM	PH3 valve closed
12/23/2010	2:49:52 PM	SiCl4 pre valve closed
12/23/2010	2:49:52 PM	SiCl4 post valve closed
12/23/2010	2:49:52 PM	Bubbler valve closed
12/23/2010	2:49:52 PM	Main Vac valve opened
12/23/2010	2:49:52 PM	Bypass valve opened
12/23/2010	2:49:52 PM	Helium MFC set to  0.000000
12/23/2010	2:49:52 PM	H2 MFC set to  0.000000
12/23/2010	2:49:52 PM	BCl3 MFC set to  0.000000
12/23/2010	2:49:52 PM	PHl3 MFC set to  0.000000
12/23/2010	2:49:52 PM	SiCl4 MFC set to  0.000000
12/23/2010	2:49:52 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	2:49:52 PM	Tube furnace set to 0
12/23/2010	2:50:52 PM	H2 valve closed
12/23/2010	2:50:52 PM	BCl3 valve closed
12/23/2010	2:50:52 PM	PH3 valve closed
12/23/2010	2:50:52 PM	SiCl4 pre valve closed
12/23/2010	2:50:52 PM	SiCl4 post valve closed
12/23/2010	2:50:52 PM	Bubbler valve closed
12/23/2010	2:50:52 PM	Helium valve opened
12/23/2010	2:50:52 PM	Main Vac valve opened
12/23/2010	2:50:52 PM	Bypass valve opened
12/23/2010	2:50:52 PM	Helium MFC set to  100.000000
12/23/2010	2:50:52 PM	H2 MFC set to  0.000000
12/23/2010	2:50:52 PM	BCl3 MFC set to  0.000000
12/23/2010	2:50:52 PM	PHl3 MFC set to  0.000000
12/23/2010	2:50:52 PM	SiCl4 MFC set to  0.000000
12/23/2010	2:50:52 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	2:50:52 PM	Tube furnace set to 0
12/23/2010	2:51:52 PM	Helium valve closed
12/23/2010	2:51:52 PM	H2 valve closed
12/23/2010	2:51:52 PM	BCl3 valve closed
12/23/2010	2:51:52 PM	PH3 valve closed
12/23/2010	2:51:52 PM	SiCl4 pre valve closed
12/23/2010	2:51:52 PM	SiCl4 post valve closed
12/23/2010	2:51:52 PM	Bubbler valve closed
12/23/2010	2:51:52 PM	Main Vac valve opened
12/23/2010	2:51:52 PM	Bypass valve opened
12/23/2010	2:51:52 PM	Helium MFC set to  0.000000
12/23/2010	2:51:52 PM	H2 MFC set to  0.000000
12/23/2010	2:51:52 PM	BCl3 MFC set to  0.000000
12/23/2010	2:51:52 PM	PHl3 MFC set to  0.000000
12/23/2010	2:51:52 PM	SiCl4 MFC set to  0.000000
12/23/2010	2:51:52 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	2:51:52 PM	Tube furnace set to 0
12/23/2010	2:52:52 PM	H2 valve closed
12/23/2010	2:52:52 PM	BCl3 valve closed
12/23/2010	2:52:52 PM	PH3 valve closed
12/23/2010	2:52:52 PM	SiCl4 pre valve closed
12/23/2010	2:52:52 PM	SiCl4 post valve closed
12/23/2010	2:52:52 PM	Bubbler valve closed
12/23/2010	2:52:52 PM	Helium valve opened
12/23/2010	2:52:52 PM	Main Vac valve opened
12/23/2010	2:52:52 PM	Bypass valve opened
12/23/2010	2:52:52 PM	Helium MFC set to  100.000000
12/23/2010	2:52:52 PM	H2 MFC set to  0.000000
12/23/2010	2:52:52 PM	BCl3 MFC set to  0.000000
12/23/2010	2:52:52 PM	PHl3 MFC set to  0.000000
12/23/2010	2:52:52 PM	SiCl4 MFC set to  0.000000
12/23/2010	2:52:52 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	2:52:52 PM	Tube furnace set to 0
12/23/2010	2:53:16 PM	Run aborted at 2:53 PM
12/23/2010	2:53:16 PM	Helium valve closed
12/23/2010	2:53:16 PM	H2 valve closed
12/23/2010	2:53:16 PM	BCl3 valve closed
12/23/2010	2:53:16 PM	PH3 valve closed
12/23/2010	2:53:16 PM	SiCl4 pre valve closed
12/23/2010	2:53:16 PM	SiCl4 post valve closed
12/23/2010	2:53:16 PM	Bypass valve closed
12/23/2010	2:53:16 PM	Main Vac valve closed
12/23/2010	2:53:16 PM	Bubbler valve closed
12/23/2010	2:53:16 PM	Helium MFC set to  0.000000
12/23/2010	2:53:16 PM	H2 MFC set to  0.000000
12/23/2010	2:53:16 PM	BCl3 MFC set to  0.000000
12/23/2010	2:53:16 PM	PHl3 MFC set to  0.000000
12/23/2010	2:53:16 PM	SiCl4 MFC set to  0.000000
12/23/2010	2:53:16 PM	Tube furnace set to 0
12/23/2010	2:53:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/23/2010	2:53:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/23/2010	2:53:53 PM	Recipe started at 2:53 PM
12/23/2010	2:53:53 PM	Helium valve closed
12/23/2010	2:53:53 PM	H2 valve closed
12/23/2010	2:53:53 PM	BCl3 valve closed
12/23/2010	2:53:53 PM	PH3 valve closed
12/23/2010	2:53:53 PM	SiCl4 pre valve closed
12/23/2010	2:53:53 PM	SiCl4 post valve closed
12/23/2010	2:53:53 PM	Main Vac valve closed
12/23/2010	2:53:53 PM	Bubbler valve closed
12/23/2010	2:53:53 PM	Bypass valve opened
12/23/2010	2:53:53 PM	Helium MFC set to  0.000000
12/23/2010	2:53:53 PM	H2 MFC set to  0.000000
12/23/2010	2:53:53 PM	BCl3 MFC set to  0.000000
12/23/2010	2:53:53 PM	PHl3 MFC set to  0.000000
12/23/2010	2:53:53 PM	SiCl4 MFC set to  0.000000
12/23/2010	2:53:53 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	2:53:53 PM	Tube furnace set to 0
12/23/2010	2:53:53 PM	Helium valve closed
12/23/2010	2:53:53 PM	H2 valve closed
12/23/2010	2:53:53 PM	BCl3 valve closed
12/23/2010	2:53:53 PM	PH3 valve closed
12/23/2010	2:53:53 PM	SiCl4 pre valve closed
12/23/2010	2:53:53 PM	SiCl4 post valve closed
12/23/2010	2:53:53 PM	Bubbler valve closed
12/23/2010	2:53:53 PM	Main Vac valve opened
12/23/2010	2:53:53 PM	Bypass valve opened
12/23/2010	2:53:53 PM	Helium MFC set to  0.000000
12/23/2010	2:53:53 PM	H2 MFC set to  0.000000
12/23/2010	2:53:53 PM	BCl3 MFC set to  0.000000
12/23/2010	2:53:53 PM	PHl3 MFC set to  0.000000
12/23/2010	2:53:53 PM	SiCl4 MFC set to  0.000000
12/23/2010	2:53:53 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	2:53:54 PM	Tube furnace set to 0
12/23/2010	2:54:54 PM	H2 valve closed
12/23/2010	2:54:54 PM	BCl3 valve closed
12/23/2010	2:54:54 PM	PH3 valve closed
12/23/2010	2:54:54 PM	SiCl4 pre valve closed
12/23/2010	2:54:54 PM	SiCl4 post valve closed
12/23/2010	2:54:54 PM	Bubbler valve closed
12/23/2010	2:54:54 PM	Helium valve opened
12/23/2010	2:54:54 PM	Main Vac valve opened
12/23/2010	2:54:54 PM	Bypass valve opened
12/23/2010	2:54:54 PM	Helium MFC set to  100.000000
12/23/2010	2:54:54 PM	H2 MFC set to  0.000000
12/23/2010	2:54:54 PM	BCl3 MFC set to  0.000000
12/23/2010	2:54:54 PM	PHl3 MFC set to  0.000000
12/23/2010	2:54:54 PM	SiCl4 MFC set to  0.000000
12/23/2010	2:54:54 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	2:54:54 PM	Tube furnace set to 0
12/23/2010	2:55:54 PM	Helium valve closed
12/23/2010	2:55:54 PM	H2 valve closed
12/23/2010	2:55:54 PM	BCl3 valve closed
12/23/2010	2:55:54 PM	PH3 valve closed
12/23/2010	2:55:54 PM	SiCl4 pre valve closed
12/23/2010	2:55:54 PM	SiCl4 post valve closed
12/23/2010	2:55:54 PM	Bubbler valve closed
12/23/2010	2:55:54 PM	Main Vac valve opened
12/23/2010	2:55:54 PM	Bypass valve opened
12/23/2010	2:55:54 PM	Helium MFC set to  0.000000
12/23/2010	2:55:54 PM	H2 MFC set to  0.000000
12/23/2010	2:55:54 PM	BCl3 MFC set to  0.000000
12/23/2010	2:55:54 PM	PHl3 MFC set to  0.000000
12/23/2010	2:55:54 PM	SiCl4 MFC set to  0.000000
12/23/2010	2:55:54 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	2:55:54 PM	Tube furnace set to 0
12/23/2010	2:56:54 PM	H2 valve closed
12/23/2010	2:56:54 PM	BCl3 valve closed
12/23/2010	2:56:54 PM	PH3 valve closed
12/23/2010	2:56:54 PM	SiCl4 pre valve closed
12/23/2010	2:56:54 PM	SiCl4 post valve closed
12/23/2010	2:56:54 PM	Bubbler valve closed
12/23/2010	2:56:54 PM	Helium valve opened
12/23/2010	2:56:54 PM	Main Vac valve opened
12/23/2010	2:56:54 PM	Bypass valve opened
12/23/2010	2:56:54 PM	Helium MFC set to  100.000000
12/23/2010	2:56:54 PM	H2 MFC set to  0.000000
12/23/2010	2:56:54 PM	BCl3 MFC set to  0.000000
12/23/2010	2:56:54 PM	PHl3 MFC set to  0.000000
12/23/2010	2:56:54 PM	SiCl4 MFC set to  0.000000
12/23/2010	2:56:54 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	2:56:54 PM	Tube furnace set to 0
12/23/2010	2:57:54 PM	Helium valve closed
12/23/2010	2:57:54 PM	H2 valve closed
12/23/2010	2:57:54 PM	BCl3 valve closed
12/23/2010	2:57:54 PM	PH3 valve closed
12/23/2010	2:57:54 PM	SiCl4 pre valve closed
12/23/2010	2:57:54 PM	SiCl4 post valve closed
12/23/2010	2:57:54 PM	Bubbler valve closed
12/23/2010	2:57:54 PM	Main Vac valve opened
12/23/2010	2:57:54 PM	Bypass valve opened
12/23/2010	2:57:54 PM	Helium MFC set to  0.000000
12/23/2010	2:57:54 PM	H2 MFC set to  0.000000
12/23/2010	2:57:54 PM	BCl3 MFC set to  0.000000
12/23/2010	2:57:54 PM	PHl3 MFC set to  0.000000
12/23/2010	2:57:54 PM	SiCl4 MFC set to  0.000000
12/23/2010	2:57:54 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	2:57:54 PM	Tube furnace set to 0
12/23/2010	2:58:54 PM	H2 valve closed
12/23/2010	2:58:54 PM	BCl3 valve closed
12/23/2010	2:58:54 PM	PH3 valve closed
12/23/2010	2:58:54 PM	SiCl4 pre valve closed
12/23/2010	2:58:54 PM	SiCl4 post valve closed
12/23/2010	2:58:54 PM	Bubbler valve closed
12/23/2010	2:58:54 PM	Helium valve opened
12/23/2010	2:58:54 PM	Main Vac valve opened
12/23/2010	2:58:54 PM	Bypass valve opened
12/23/2010	2:58:54 PM	Helium MFC set to  100.000000
12/23/2010	2:58:54 PM	H2 MFC set to  0.000000
12/23/2010	2:58:54 PM	BCl3 MFC set to  0.000000
12/23/2010	2:58:54 PM	PHl3 MFC set to  0.000000
12/23/2010	2:58:54 PM	SiCl4 MFC set to  0.000000
12/23/2010	2:58:54 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	2:58:55 PM	Tube furnace set to 0
12/23/2010	2:59:55 PM	Helium valve closed
12/23/2010	2:59:55 PM	H2 valve closed
12/23/2010	2:59:55 PM	BCl3 valve closed
12/23/2010	2:59:55 PM	PH3 valve closed
12/23/2010	2:59:55 PM	SiCl4 pre valve closed
12/23/2010	2:59:55 PM	SiCl4 post valve closed
12/23/2010	2:59:55 PM	Bubbler valve closed
12/23/2010	2:59:55 PM	Main Vac valve opened
12/23/2010	2:59:55 PM	Bypass valve opened
12/23/2010	2:59:55 PM	Helium MFC set to  0.000000
12/23/2010	2:59:55 PM	H2 MFC set to  0.000000
12/23/2010	2:59:55 PM	BCl3 MFC set to  0.000000
12/23/2010	2:59:55 PM	PHl3 MFC set to  0.000000
12/23/2010	2:59:55 PM	SiCl4 MFC set to  0.000000
12/23/2010	2:59:55 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	2:59:55 PM	Tube furnace set to 0
12/23/2010	3:00:55 PM	H2 valve closed
12/23/2010	3:00:55 PM	BCl3 valve closed
12/23/2010	3:00:55 PM	PH3 valve closed
12/23/2010	3:00:55 PM	SiCl4 pre valve closed
12/23/2010	3:00:55 PM	SiCl4 post valve closed
12/23/2010	3:00:55 PM	Bubbler valve closed
12/23/2010	3:00:55 PM	Helium valve opened
12/23/2010	3:00:55 PM	Main Vac valve opened
12/23/2010	3:00:55 PM	Bypass valve opened
12/23/2010	3:00:55 PM	Helium MFC set to  100.000000
12/23/2010	3:00:55 PM	H2 MFC set to  0.000000
12/23/2010	3:00:55 PM	BCl3 MFC set to  0.000000
12/23/2010	3:00:55 PM	PHl3 MFC set to  0.000000
12/23/2010	3:00:55 PM	SiCl4 MFC set to  0.000000
12/23/2010	3:00:55 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	3:00:55 PM	Tube furnace set to 0
12/23/2010	3:01:55 PM	Helium valve closed
12/23/2010	3:01:55 PM	H2 valve closed
12/23/2010	3:01:55 PM	BCl3 valve closed
12/23/2010	3:01:55 PM	PH3 valve closed
12/23/2010	3:01:55 PM	SiCl4 pre valve closed
12/23/2010	3:01:55 PM	SiCl4 post valve closed
12/23/2010	3:01:55 PM	Bubbler valve closed
12/23/2010	3:01:55 PM	Main Vac valve opened
12/23/2010	3:01:55 PM	Bypass valve opened
12/23/2010	3:01:55 PM	Helium MFC set to  0.000000
12/23/2010	3:01:55 PM	H2 MFC set to  0.000000
12/23/2010	3:01:55 PM	BCl3 MFC set to  0.000000
12/23/2010	3:01:55 PM	PHl3 MFC set to  0.000000
12/23/2010	3:01:55 PM	SiCl4 MFC set to  0.000000
12/23/2010	3:01:55 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	3:01:55 PM	Tube furnace set to 0
12/23/2010	3:02:55 PM	H2 valve closed
12/23/2010	3:02:55 PM	BCl3 valve closed
12/23/2010	3:02:55 PM	PH3 valve closed
12/23/2010	3:02:55 PM	SiCl4 pre valve closed
12/23/2010	3:02:55 PM	SiCl4 post valve closed
12/23/2010	3:02:55 PM	Bubbler valve closed
12/23/2010	3:02:55 PM	Helium valve opened
12/23/2010	3:02:55 PM	Main Vac valve opened
12/23/2010	3:02:55 PM	Bypass valve opened
12/23/2010	3:02:55 PM	Helium MFC set to  100.000000
12/23/2010	3:02:55 PM	H2 MFC set to  0.000000
12/23/2010	3:02:55 PM	BCl3 MFC set to  0.000000
12/23/2010	3:02:55 PM	PHl3 MFC set to  0.000000
12/23/2010	3:02:55 PM	SiCl4 MFC set to  0.000000
12/23/2010	3:02:55 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	3:02:55 PM	Tube furnace set to 0
12/23/2010	3:03:55 PM	Helium valve closed
12/23/2010	3:03:55 PM	H2 valve closed
12/23/2010	3:03:55 PM	BCl3 valve closed
12/23/2010	3:03:55 PM	PH3 valve closed
12/23/2010	3:03:55 PM	SiCl4 pre valve closed
12/23/2010	3:03:55 PM	SiCl4 post valve closed
12/23/2010	3:03:55 PM	Bubbler valve closed
12/23/2010	3:03:55 PM	Main Vac valve opened
12/23/2010	3:03:55 PM	Bypass valve opened
12/23/2010	3:03:55 PM	Helium MFC set to  0.000000
12/23/2010	3:03:55 PM	H2 MFC set to  0.000000
12/23/2010	3:03:55 PM	BCl3 MFC set to  0.000000
12/23/2010	3:03:55 PM	PHl3 MFC set to  0.000000
12/23/2010	3:03:55 PM	SiCl4 MFC set to  0.000000
12/23/2010	3:03:55 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	3:03:56 PM	Tube furnace set to 0
12/23/2010	3:04:56 PM	H2 valve closed
12/23/2010	3:04:56 PM	BCl3 valve closed
12/23/2010	3:04:56 PM	PH3 valve closed
12/23/2010	3:04:56 PM	SiCl4 pre valve closed
12/23/2010	3:04:56 PM	SiCl4 post valve closed
12/23/2010	3:04:56 PM	Bubbler valve closed
12/23/2010	3:04:56 PM	Helium valve opened
12/23/2010	3:04:56 PM	Main Vac valve opened
12/23/2010	3:04:56 PM	Bypass valve opened
12/23/2010	3:04:56 PM	Helium MFC set to  100.000000
12/23/2010	3:04:56 PM	H2 MFC set to  0.000000
12/23/2010	3:04:56 PM	BCl3 MFC set to  0.000000
12/23/2010	3:04:56 PM	PHl3 MFC set to  0.000000
12/23/2010	3:04:56 PM	SiCl4 MFC set to  0.000000
12/23/2010	3:04:56 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	3:04:56 PM	Tube furnace set to 0
12/23/2010	3:05:56 PM	Helium valve closed
12/23/2010	3:05:56 PM	H2 valve closed
12/23/2010	3:05:56 PM	BCl3 valve closed
12/23/2010	3:05:56 PM	PH3 valve closed
12/23/2010	3:05:56 PM	SiCl4 pre valve closed
12/23/2010	3:05:56 PM	SiCl4 post valve closed
12/23/2010	3:05:56 PM	Bubbler valve closed
12/23/2010	3:05:56 PM	Main Vac valve opened
12/23/2010	3:05:56 PM	Bypass valve opened
12/23/2010	3:05:56 PM	Helium MFC set to  0.000000
12/23/2010	3:05:56 PM	H2 MFC set to  0.000000
12/23/2010	3:05:56 PM	BCl3 MFC set to  0.000000
12/23/2010	3:05:56 PM	PHl3 MFC set to  0.000000
12/23/2010	3:05:56 PM	SiCl4 MFC set to  0.000000
12/23/2010	3:05:56 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	3:05:56 PM	Tube furnace set to 0
12/23/2010	3:06:56 PM	H2 valve closed
12/23/2010	3:06:56 PM	BCl3 valve closed
12/23/2010	3:06:56 PM	PH3 valve closed
12/23/2010	3:06:56 PM	SiCl4 pre valve closed
12/23/2010	3:06:56 PM	SiCl4 post valve closed
12/23/2010	3:06:56 PM	Bubbler valve closed
12/23/2010	3:06:56 PM	Helium valve opened
12/23/2010	3:06:56 PM	Main Vac valve opened
12/23/2010	3:06:56 PM	Bypass valve opened
12/23/2010	3:06:56 PM	Helium MFC set to  100.000000
12/23/2010	3:06:56 PM	H2 MFC set to  0.000000
12/23/2010	3:06:56 PM	BCl3 MFC set to  0.000000
12/23/2010	3:06:56 PM	PHl3 MFC set to  0.000000
12/23/2010	3:06:56 PM	SiCl4 MFC set to  0.000000
12/23/2010	3:06:56 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	3:06:56 PM	Tube furnace set to 0
12/23/2010	3:07:56 PM	Helium valve closed
12/23/2010	3:07:56 PM	H2 valve closed
12/23/2010	3:07:56 PM	BCl3 valve closed
12/23/2010	3:07:56 PM	PH3 valve closed
12/23/2010	3:07:56 PM	SiCl4 pre valve closed
12/23/2010	3:07:56 PM	SiCl4 post valve closed
12/23/2010	3:07:56 PM	Bubbler valve closed
12/23/2010	3:07:56 PM	Main Vac valve opened
12/23/2010	3:07:56 PM	Bypass valve opened
12/23/2010	3:07:56 PM	Helium MFC set to  0.000000
12/23/2010	3:07:56 PM	H2 MFC set to  0.000000
12/23/2010	3:07:56 PM	BCl3 MFC set to  0.000000
12/23/2010	3:07:56 PM	PHl3 MFC set to  0.000000
12/23/2010	3:07:56 PM	SiCl4 MFC set to  0.000000
12/23/2010	3:07:56 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	3:07:56 PM	Tube furnace set to 0
12/23/2010	3:08:56 PM	H2 valve closed
12/23/2010	3:08:56 PM	BCl3 valve closed
12/23/2010	3:08:56 PM	PH3 valve closed
12/23/2010	3:08:56 PM	SiCl4 pre valve closed
12/23/2010	3:08:56 PM	SiCl4 post valve closed
12/23/2010	3:08:56 PM	Bubbler valve closed
12/23/2010	3:08:56 PM	Helium valve opened
12/23/2010	3:08:56 PM	Main Vac valve opened
12/23/2010	3:08:56 PM	Bypass valve opened
12/23/2010	3:08:56 PM	Helium MFC set to  100.000000
12/23/2010	3:08:56 PM	H2 MFC set to  0.000000
12/23/2010	3:08:56 PM	BCl3 MFC set to  0.000000
12/23/2010	3:08:56 PM	PHl3 MFC set to  0.000000
12/23/2010	3:08:56 PM	SiCl4 MFC set to  0.000000
12/23/2010	3:08:56 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	3:08:57 PM	Tube furnace set to 0
12/23/2010	3:09:57 PM	Helium valve closed
12/23/2010	3:09:57 PM	H2 valve closed
12/23/2010	3:09:57 PM	BCl3 valve closed
12/23/2010	3:09:57 PM	PH3 valve closed
12/23/2010	3:09:57 PM	SiCl4 pre valve closed
12/23/2010	3:09:57 PM	SiCl4 post valve closed
12/23/2010	3:09:57 PM	Bubbler valve closed
12/23/2010	3:09:57 PM	Main Vac valve opened
12/23/2010	3:09:57 PM	Bypass valve opened
12/23/2010	3:09:57 PM	Helium MFC set to  0.000000
12/23/2010	3:09:57 PM	H2 MFC set to  0.000000
12/23/2010	3:09:57 PM	BCl3 MFC set to  0.000000
12/23/2010	3:09:57 PM	PHl3 MFC set to  0.000000
12/23/2010	3:09:57 PM	SiCl4 MFC set to  0.000000
12/23/2010	3:09:57 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	3:09:57 PM	Tube furnace set to 0
12/23/2010	3:10:57 PM	H2 valve closed
12/23/2010	3:10:57 PM	BCl3 valve closed
12/23/2010	3:10:57 PM	PH3 valve closed
12/23/2010	3:10:57 PM	SiCl4 pre valve closed
12/23/2010	3:10:57 PM	SiCl4 post valve closed
12/23/2010	3:10:57 PM	Bubbler valve closed
12/23/2010	3:10:57 PM	Helium valve opened
12/23/2010	3:10:57 PM	Main Vac valve opened
12/23/2010	3:10:57 PM	Bypass valve opened
12/23/2010	3:10:57 PM	Helium MFC set to  100.000000
12/23/2010	3:10:57 PM	H2 MFC set to  0.000000
12/23/2010	3:10:57 PM	BCl3 MFC set to  0.000000
12/23/2010	3:10:57 PM	PHl3 MFC set to  0.000000
12/23/2010	3:10:57 PM	SiCl4 MFC set to  0.000000
12/23/2010	3:10:57 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	3:10:57 PM	Tube furnace set to 0
12/23/2010	3:11:57 PM	Helium valve closed
12/23/2010	3:11:57 PM	H2 valve closed
12/23/2010	3:11:57 PM	BCl3 valve closed
12/23/2010	3:11:57 PM	PH3 valve closed
12/23/2010	3:11:57 PM	SiCl4 pre valve closed
12/23/2010	3:11:57 PM	SiCl4 post valve closed
12/23/2010	3:11:57 PM	Bubbler valve closed
12/23/2010	3:11:57 PM	Main Vac valve opened
12/23/2010	3:11:57 PM	Bypass valve opened
12/23/2010	3:11:57 PM	Helium MFC set to  0.000000
12/23/2010	3:11:57 PM	H2 MFC set to  0.000000
12/23/2010	3:11:57 PM	BCl3 MFC set to  0.000000
12/23/2010	3:11:57 PM	PHl3 MFC set to  0.000000
12/23/2010	3:11:57 PM	SiCl4 MFC set to  0.000000
12/23/2010	3:11:57 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	3:11:57 PM	Tube furnace set to 0
12/23/2010	3:12:57 PM	H2 valve closed
12/23/2010	3:12:57 PM	BCl3 valve closed
12/23/2010	3:12:57 PM	PH3 valve closed
12/23/2010	3:12:57 PM	SiCl4 pre valve closed
12/23/2010	3:12:57 PM	SiCl4 post valve closed
12/23/2010	3:12:57 PM	Bubbler valve closed
12/23/2010	3:12:57 PM	Helium valve opened
12/23/2010	3:12:57 PM	Main Vac valve opened
12/23/2010	3:12:57 PM	Bypass valve opened
12/23/2010	3:12:57 PM	Helium MFC set to  100.000000
12/23/2010	3:12:57 PM	H2 MFC set to  0.000000
12/23/2010	3:12:57 PM	BCl3 MFC set to  0.000000
12/23/2010	3:12:57 PM	PHl3 MFC set to  0.000000
12/23/2010	3:12:57 PM	SiCl4 MFC set to  0.000000
12/23/2010	3:12:57 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	3:12:57 PM	Tube furnace set to 0
12/23/2010	3:13:57 PM	Helium valve closed
12/23/2010	3:13:57 PM	H2 valve closed
12/23/2010	3:13:57 PM	BCl3 valve closed
12/23/2010	3:13:57 PM	PH3 valve closed
12/23/2010	3:13:57 PM	SiCl4 pre valve closed
12/23/2010	3:13:57 PM	SiCl4 post valve closed
12/23/2010	3:13:57 PM	Bubbler valve closed
12/23/2010	3:13:57 PM	Main Vac valve opened
12/23/2010	3:13:57 PM	Bypass valve opened
12/23/2010	3:13:57 PM	Helium MFC set to  0.000000
12/23/2010	3:13:57 PM	H2 MFC set to  0.000000
12/23/2010	3:13:57 PM	BCl3 MFC set to  0.000000
12/23/2010	3:13:57 PM	PHl3 MFC set to  0.000000
12/23/2010	3:13:57 PM	SiCl4 MFC set to  0.000000
12/23/2010	3:13:58 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	3:13:58 PM	Tube furnace set to 0
12/23/2010	3:13:59 PM	Run finished at 3:13 PM
12/23/2010	3:13:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/23/2010	3:14:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/23/2010	3:15:02 PM	Recipe started at 3:14 PM
12/23/2010	3:15:02 PM	Helium valve closed
12/23/2010	3:15:02 PM	H2 valve closed
12/23/2010	3:15:02 PM	BCl3 valve closed
12/23/2010	3:15:02 PM	PH3 valve closed
12/23/2010	3:15:02 PM	SiCl4 pre valve closed
12/23/2010	3:15:02 PM	SiCl4 post valve closed
12/23/2010	3:15:02 PM	Main Vac valve closed
12/23/2010	3:15:02 PM	Bubbler valve closed
12/23/2010	3:15:02 PM	Bypass valve opened
12/23/2010	3:15:02 PM	Helium MFC set to  0.000000
12/23/2010	3:15:02 PM	H2 MFC set to  0.000000
12/23/2010	3:15:02 PM	BCl3 MFC set to  0.000000
12/23/2010	3:15:02 PM	PHl3 MFC set to  0.000000
12/23/2010	3:15:02 PM	SiCl4 MFC set to  0.000000
12/23/2010	3:15:02 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	3:15:02 PM	Tube furnace set to 0
12/23/2010	3:15:02 PM	Helium valve closed
12/23/2010	3:15:02 PM	H2 valve closed
12/23/2010	3:15:02 PM	BCl3 valve closed
12/23/2010	3:15:02 PM	PH3 valve closed
12/23/2010	3:15:02 PM	SiCl4 pre valve closed
12/23/2010	3:15:02 PM	SiCl4 post valve closed
12/23/2010	3:15:02 PM	Bubbler valve closed
12/23/2010	3:15:02 PM	Main Vac valve opened
12/23/2010	3:15:02 PM	Bypass valve opened
12/23/2010	3:15:02 PM	Helium MFC set to  0.000000
12/23/2010	3:15:02 PM	H2 MFC set to  0.000000
12/23/2010	3:15:02 PM	BCl3 MFC set to  0.000000
12/23/2010	3:15:02 PM	PHl3 MFC set to  0.000000
12/23/2010	3:15:02 PM	SiCl4 MFC set to  0.000000
12/23/2010	3:15:02 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	3:15:02 PM	Tube furnace set to 0
12/23/2010	3:16:02 PM	H2 valve closed
12/23/2010	3:16:02 PM	BCl3 valve closed
12/23/2010	3:16:02 PM	PH3 valve closed
12/23/2010	3:16:02 PM	SiCl4 pre valve closed
12/23/2010	3:16:02 PM	SiCl4 post valve closed
12/23/2010	3:16:02 PM	Bubbler valve closed
12/23/2010	3:16:02 PM	Helium valve opened
12/23/2010	3:16:02 PM	Main Vac valve opened
12/23/2010	3:16:02 PM	Bypass valve opened
12/23/2010	3:16:02 PM	Helium MFC set to  100.000000
12/23/2010	3:16:02 PM	H2 MFC set to  0.000000
12/23/2010	3:16:02 PM	BCl3 MFC set to  0.000000
12/23/2010	3:16:02 PM	PHl3 MFC set to  0.000000
12/23/2010	3:16:02 PM	SiCl4 MFC set to  0.000000
12/23/2010	3:16:02 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	3:16:03 PM	Tube furnace set to 0
12/23/2010	3:17:03 PM	Helium valve closed
12/23/2010	3:17:03 PM	H2 valve closed
12/23/2010	3:17:03 PM	BCl3 valve closed
12/23/2010	3:17:03 PM	PH3 valve closed
12/23/2010	3:17:03 PM	SiCl4 pre valve closed
12/23/2010	3:17:03 PM	SiCl4 post valve closed
12/23/2010	3:17:03 PM	Bubbler valve closed
12/23/2010	3:17:03 PM	Main Vac valve opened
12/23/2010	3:17:03 PM	Bypass valve opened
12/23/2010	3:17:03 PM	Helium MFC set to  0.000000
12/23/2010	3:17:03 PM	H2 MFC set to  0.000000
12/23/2010	3:17:03 PM	BCl3 MFC set to  0.000000
12/23/2010	3:17:03 PM	PHl3 MFC set to  0.000000
12/23/2010	3:17:03 PM	SiCl4 MFC set to  0.000000
12/23/2010	3:17:03 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	3:17:03 PM	Tube furnace set to 0
12/23/2010	3:18:03 PM	H2 valve closed
12/23/2010	3:18:03 PM	BCl3 valve closed
12/23/2010	3:18:03 PM	PH3 valve closed
12/23/2010	3:18:03 PM	SiCl4 pre valve closed
12/23/2010	3:18:03 PM	SiCl4 post valve closed
12/23/2010	3:18:03 PM	Bubbler valve closed
12/23/2010	3:18:03 PM	Helium valve opened
12/23/2010	3:18:03 PM	Main Vac valve opened
12/23/2010	3:18:03 PM	Bypass valve opened
12/23/2010	3:18:03 PM	Helium MFC set to  100.000000
12/23/2010	3:18:03 PM	H2 MFC set to  0.000000
12/23/2010	3:18:03 PM	BCl3 MFC set to  0.000000
12/23/2010	3:18:03 PM	PHl3 MFC set to  0.000000
12/23/2010	3:18:03 PM	SiCl4 MFC set to  0.000000
12/23/2010	3:18:03 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	3:18:03 PM	Tube furnace set to 0
12/23/2010	3:19:03 PM	Helium valve closed
12/23/2010	3:19:03 PM	H2 valve closed
12/23/2010	3:19:03 PM	BCl3 valve closed
12/23/2010	3:19:03 PM	PH3 valve closed
12/23/2010	3:19:03 PM	SiCl4 pre valve closed
12/23/2010	3:19:03 PM	SiCl4 post valve closed
12/23/2010	3:19:03 PM	Bubbler valve closed
12/23/2010	3:19:03 PM	Main Vac valve opened
12/23/2010	3:19:03 PM	Bypass valve opened
12/23/2010	3:19:03 PM	Helium MFC set to  0.000000
12/23/2010	3:19:03 PM	H2 MFC set to  0.000000
12/23/2010	3:19:03 PM	BCl3 MFC set to  0.000000
12/23/2010	3:19:03 PM	PHl3 MFC set to  0.000000
12/23/2010	3:19:03 PM	SiCl4 MFC set to  0.000000
12/23/2010	3:19:03 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	3:19:03 PM	Tube furnace set to 0
12/23/2010	3:20:03 PM	H2 valve closed
12/23/2010	3:20:03 PM	BCl3 valve closed
12/23/2010	3:20:03 PM	PH3 valve closed
12/23/2010	3:20:03 PM	SiCl4 pre valve closed
12/23/2010	3:20:03 PM	SiCl4 post valve closed
12/23/2010	3:20:03 PM	Bubbler valve closed
12/23/2010	3:20:03 PM	Helium valve opened
12/23/2010	3:20:03 PM	Main Vac valve opened
12/23/2010	3:20:03 PM	Bypass valve opened
12/23/2010	3:20:03 PM	Helium MFC set to  100.000000
12/23/2010	3:20:03 PM	H2 MFC set to  0.000000
12/23/2010	3:20:03 PM	BCl3 MFC set to  0.000000
12/23/2010	3:20:03 PM	PHl3 MFC set to  0.000000
12/23/2010	3:20:03 PM	SiCl4 MFC set to  0.000000
12/23/2010	3:20:03 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	3:20:03 PM	Tube furnace set to 0
12/23/2010	3:21:03 PM	Helium valve closed
12/23/2010	3:21:03 PM	H2 valve closed
12/23/2010	3:21:03 PM	BCl3 valve closed
12/23/2010	3:21:03 PM	PH3 valve closed
12/23/2010	3:21:03 PM	SiCl4 pre valve closed
12/23/2010	3:21:03 PM	SiCl4 post valve closed
12/23/2010	3:21:03 PM	Bubbler valve closed
12/23/2010	3:21:03 PM	Main Vac valve opened
12/23/2010	3:21:03 PM	Bypass valve opened
12/23/2010	3:21:03 PM	Helium MFC set to  0.000000
12/23/2010	3:21:03 PM	H2 MFC set to  0.000000
12/23/2010	3:21:03 PM	BCl3 MFC set to  0.000000
12/23/2010	3:21:03 PM	PHl3 MFC set to  0.000000
12/23/2010	3:21:03 PM	SiCl4 MFC set to  0.000000
12/23/2010	3:21:03 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	3:21:04 PM	Tube furnace set to 0
12/23/2010	3:22:04 PM	H2 valve closed
12/23/2010	3:22:04 PM	BCl3 valve closed
12/23/2010	3:22:04 PM	PH3 valve closed
12/23/2010	3:22:04 PM	SiCl4 pre valve closed
12/23/2010	3:22:04 PM	SiCl4 post valve closed
12/23/2010	3:22:04 PM	Bubbler valve closed
12/23/2010	3:22:04 PM	Helium valve opened
12/23/2010	3:22:04 PM	Main Vac valve opened
12/23/2010	3:22:04 PM	Bypass valve opened
12/23/2010	3:22:04 PM	Helium MFC set to  100.000000
12/23/2010	3:22:04 PM	H2 MFC set to  0.000000
12/23/2010	3:22:04 PM	BCl3 MFC set to  0.000000
12/23/2010	3:22:04 PM	PHl3 MFC set to  0.000000
12/23/2010	3:22:04 PM	SiCl4 MFC set to  0.000000
12/23/2010	3:22:04 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	3:22:04 PM	Tube furnace set to 0
12/23/2010	3:23:04 PM	Helium valve closed
12/23/2010	3:23:04 PM	H2 valve closed
12/23/2010	3:23:04 PM	BCl3 valve closed
12/23/2010	3:23:04 PM	PH3 valve closed
12/23/2010	3:23:04 PM	SiCl4 pre valve closed
12/23/2010	3:23:04 PM	SiCl4 post valve closed
12/23/2010	3:23:04 PM	Bubbler valve closed
12/23/2010	3:23:04 PM	Main Vac valve opened
12/23/2010	3:23:04 PM	Bypass valve opened
12/23/2010	3:23:04 PM	Helium MFC set to  0.000000
12/23/2010	3:23:04 PM	H2 MFC set to  0.000000
12/23/2010	3:23:04 PM	BCl3 MFC set to  0.000000
12/23/2010	3:23:04 PM	PHl3 MFC set to  0.000000
12/23/2010	3:23:04 PM	SiCl4 MFC set to  0.000000
12/23/2010	3:23:04 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	3:23:04 PM	Tube furnace set to 0
12/23/2010	3:24:04 PM	H2 valve closed
12/23/2010	3:24:04 PM	BCl3 valve closed
12/23/2010	3:24:04 PM	PH3 valve closed
12/23/2010	3:24:04 PM	SiCl4 pre valve closed
12/23/2010	3:24:04 PM	SiCl4 post valve closed
12/23/2010	3:24:04 PM	Bubbler valve closed
12/23/2010	3:24:04 PM	Helium valve opened
12/23/2010	3:24:04 PM	Main Vac valve opened
12/23/2010	3:24:04 PM	Bypass valve opened
12/23/2010	3:24:04 PM	Helium MFC set to  100.000000
12/23/2010	3:24:04 PM	H2 MFC set to  0.000000
12/23/2010	3:24:04 PM	BCl3 MFC set to  0.000000
12/23/2010	3:24:04 PM	PHl3 MFC set to  0.000000
12/23/2010	3:24:04 PM	SiCl4 MFC set to  0.000000
12/23/2010	3:24:04 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	3:24:04 PM	Tube furnace set to 0
12/23/2010	3:25:04 PM	Helium valve closed
12/23/2010	3:25:04 PM	H2 valve closed
12/23/2010	3:25:04 PM	BCl3 valve closed
12/23/2010	3:25:04 PM	PH3 valve closed
12/23/2010	3:25:04 PM	SiCl4 pre valve closed
12/23/2010	3:25:04 PM	SiCl4 post valve closed
12/23/2010	3:25:04 PM	Bubbler valve closed
12/23/2010	3:25:04 PM	Main Vac valve opened
12/23/2010	3:25:04 PM	Bypass valve opened
12/23/2010	3:25:04 PM	Helium MFC set to  0.000000
12/23/2010	3:25:04 PM	H2 MFC set to  0.000000
12/23/2010	3:25:04 PM	BCl3 MFC set to  0.000000
12/23/2010	3:25:04 PM	PHl3 MFC set to  0.000000
12/23/2010	3:25:04 PM	SiCl4 MFC set to  0.000000
12/23/2010	3:25:04 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	3:25:04 PM	Tube furnace set to 0
12/23/2010	3:26:04 PM	H2 valve closed
12/23/2010	3:26:04 PM	BCl3 valve closed
12/23/2010	3:26:04 PM	PH3 valve closed
12/23/2010	3:26:04 PM	SiCl4 pre valve closed
12/23/2010	3:26:04 PM	SiCl4 post valve closed
12/23/2010	3:26:04 PM	Bubbler valve closed
12/23/2010	3:26:04 PM	Helium valve opened
12/23/2010	3:26:04 PM	Main Vac valve opened
12/23/2010	3:26:04 PM	Bypass valve opened
12/23/2010	3:26:04 PM	Helium MFC set to  100.000000
12/23/2010	3:26:04 PM	H2 MFC set to  0.000000
12/23/2010	3:26:04 PM	BCl3 MFC set to  0.000000
12/23/2010	3:26:04 PM	PHl3 MFC set to  0.000000
12/23/2010	3:26:04 PM	SiCl4 MFC set to  0.000000
12/23/2010	3:26:04 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	3:26:05 PM	Tube furnace set to 0
12/23/2010	3:27:05 PM	Helium valve closed
12/23/2010	3:27:05 PM	H2 valve closed
12/23/2010	3:27:05 PM	BCl3 valve closed
12/23/2010	3:27:05 PM	PH3 valve closed
12/23/2010	3:27:05 PM	SiCl4 pre valve closed
12/23/2010	3:27:05 PM	SiCl4 post valve closed
12/23/2010	3:27:05 PM	Bubbler valve closed
12/23/2010	3:27:05 PM	Main Vac valve opened
12/23/2010	3:27:05 PM	Bypass valve opened
12/23/2010	3:27:05 PM	Helium MFC set to  0.000000
12/23/2010	3:27:05 PM	H2 MFC set to  0.000000
12/23/2010	3:27:05 PM	BCl3 MFC set to  0.000000
12/23/2010	3:27:05 PM	PHl3 MFC set to  0.000000
12/23/2010	3:27:05 PM	SiCl4 MFC set to  0.000000
12/23/2010	3:27:05 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	3:27:05 PM	Tube furnace set to 0
12/23/2010	3:28:05 PM	H2 valve closed
12/23/2010	3:28:05 PM	BCl3 valve closed
12/23/2010	3:28:05 PM	PH3 valve closed
12/23/2010	3:28:05 PM	SiCl4 pre valve closed
12/23/2010	3:28:05 PM	SiCl4 post valve closed
12/23/2010	3:28:05 PM	Bubbler valve closed
12/23/2010	3:28:05 PM	Helium valve opened
12/23/2010	3:28:05 PM	Main Vac valve opened
12/23/2010	3:28:05 PM	Bypass valve opened
12/23/2010	3:28:05 PM	Helium MFC set to  100.000000
12/23/2010	3:28:05 PM	H2 MFC set to  0.000000
12/23/2010	3:28:05 PM	BCl3 MFC set to  0.000000
12/23/2010	3:28:05 PM	PHl3 MFC set to  0.000000
12/23/2010	3:28:05 PM	SiCl4 MFC set to  0.000000
12/23/2010	3:28:05 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	3:28:05 PM	Tube furnace set to 0
12/23/2010	3:29:05 PM	Helium valve closed
12/23/2010	3:29:05 PM	H2 valve closed
12/23/2010	3:29:05 PM	BCl3 valve closed
12/23/2010	3:29:05 PM	PH3 valve closed
12/23/2010	3:29:05 PM	SiCl4 pre valve closed
12/23/2010	3:29:05 PM	SiCl4 post valve closed
12/23/2010	3:29:05 PM	Bubbler valve closed
12/23/2010	3:29:05 PM	Main Vac valve opened
12/23/2010	3:29:05 PM	Bypass valve opened
12/23/2010	3:29:05 PM	Helium MFC set to  0.000000
12/23/2010	3:29:05 PM	H2 MFC set to  0.000000
12/23/2010	3:29:05 PM	BCl3 MFC set to  0.000000
12/23/2010	3:29:05 PM	PHl3 MFC set to  0.000000
12/23/2010	3:29:05 PM	SiCl4 MFC set to  0.000000
12/23/2010	3:29:05 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	3:29:05 PM	Tube furnace set to 0
12/23/2010	3:30:05 PM	H2 valve closed
12/23/2010	3:30:05 PM	BCl3 valve closed
12/23/2010	3:30:05 PM	PH3 valve closed
12/23/2010	3:30:05 PM	SiCl4 pre valve closed
12/23/2010	3:30:05 PM	SiCl4 post valve closed
12/23/2010	3:30:05 PM	Bubbler valve closed
12/23/2010	3:30:05 PM	Helium valve opened
12/23/2010	3:30:05 PM	Main Vac valve opened
12/23/2010	3:30:05 PM	Bypass valve opened
12/23/2010	3:30:05 PM	Helium MFC set to  100.000000
12/23/2010	3:30:05 PM	H2 MFC set to  0.000000
12/23/2010	3:30:05 PM	BCl3 MFC set to  0.000000
12/23/2010	3:30:05 PM	PHl3 MFC set to  0.000000
12/23/2010	3:30:05 PM	SiCl4 MFC set to  0.000000
12/23/2010	3:30:05 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	3:30:05 PM	Tube furnace set to 0
12/23/2010	3:31:05 PM	Helium valve closed
12/23/2010	3:31:05 PM	H2 valve closed
12/23/2010	3:31:05 PM	BCl3 valve closed
12/23/2010	3:31:05 PM	PH3 valve closed
12/23/2010	3:31:05 PM	SiCl4 pre valve closed
12/23/2010	3:31:05 PM	SiCl4 post valve closed
12/23/2010	3:31:05 PM	Bubbler valve closed
12/23/2010	3:31:05 PM	Main Vac valve opened
12/23/2010	3:31:05 PM	Bypass valve opened
12/23/2010	3:31:05 PM	Helium MFC set to  0.000000
12/23/2010	3:31:05 PM	H2 MFC set to  0.000000
12/23/2010	3:31:05 PM	BCl3 MFC set to  0.000000
12/23/2010	3:31:05 PM	PHl3 MFC set to  0.000000
12/23/2010	3:31:05 PM	SiCl4 MFC set to  0.000000
12/23/2010	3:31:05 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	3:31:06 PM	Tube furnace set to 0
12/23/2010	3:32:06 PM	H2 valve closed
12/23/2010	3:32:06 PM	BCl3 valve closed
12/23/2010	3:32:06 PM	PH3 valve closed
12/23/2010	3:32:06 PM	SiCl4 pre valve closed
12/23/2010	3:32:06 PM	SiCl4 post valve closed
12/23/2010	3:32:06 PM	Bubbler valve closed
12/23/2010	3:32:06 PM	Helium valve opened
12/23/2010	3:32:06 PM	Main Vac valve opened
12/23/2010	3:32:06 PM	Bypass valve opened
12/23/2010	3:32:06 PM	Helium MFC set to  100.000000
12/23/2010	3:32:06 PM	H2 MFC set to  0.000000
12/23/2010	3:32:06 PM	BCl3 MFC set to  0.000000
12/23/2010	3:32:06 PM	PHl3 MFC set to  0.000000
12/23/2010	3:32:06 PM	SiCl4 MFC set to  0.000000
12/23/2010	3:32:06 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	3:32:06 PM	Tube furnace set to 0
12/23/2010	3:33:06 PM	Helium valve closed
12/23/2010	3:33:06 PM	H2 valve closed
12/23/2010	3:33:06 PM	BCl3 valve closed
12/23/2010	3:33:06 PM	PH3 valve closed
12/23/2010	3:33:06 PM	SiCl4 pre valve closed
12/23/2010	3:33:06 PM	SiCl4 post valve closed
12/23/2010	3:33:06 PM	Bubbler valve closed
12/23/2010	3:33:06 PM	Main Vac valve opened
12/23/2010	3:33:06 PM	Bypass valve opened
12/23/2010	3:33:06 PM	Helium MFC set to  0.000000
12/23/2010	3:33:06 PM	H2 MFC set to  0.000000
12/23/2010	3:33:06 PM	BCl3 MFC set to  0.000000
12/23/2010	3:33:06 PM	PHl3 MFC set to  0.000000
12/23/2010	3:33:06 PM	SiCl4 MFC set to  0.000000
12/23/2010	3:33:06 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	3:33:06 PM	Tube furnace set to 0
12/23/2010	3:34:06 PM	H2 valve closed
12/23/2010	3:34:06 PM	BCl3 valve closed
12/23/2010	3:34:06 PM	PH3 valve closed
12/23/2010	3:34:06 PM	SiCl4 pre valve closed
12/23/2010	3:34:06 PM	SiCl4 post valve closed
12/23/2010	3:34:06 PM	Bubbler valve closed
12/23/2010	3:34:06 PM	Helium valve opened
12/23/2010	3:34:06 PM	Main Vac valve opened
12/23/2010	3:34:06 PM	Bypass valve opened
12/23/2010	3:34:06 PM	Helium MFC set to  100.000000
12/23/2010	3:34:06 PM	H2 MFC set to  0.000000
12/23/2010	3:34:06 PM	BCl3 MFC set to  0.000000
12/23/2010	3:34:06 PM	PHl3 MFC set to  0.000000
12/23/2010	3:34:06 PM	SiCl4 MFC set to  0.000000
12/23/2010	3:34:06 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	3:34:06 PM	Tube furnace set to 0
12/23/2010	3:35:06 PM	Helium valve closed
12/23/2010	3:35:06 PM	H2 valve closed
12/23/2010	3:35:06 PM	BCl3 valve closed
12/23/2010	3:35:06 PM	PH3 valve closed
12/23/2010	3:35:06 PM	SiCl4 pre valve closed
12/23/2010	3:35:06 PM	SiCl4 post valve closed
12/23/2010	3:35:06 PM	Bubbler valve closed
12/23/2010	3:35:06 PM	Main Vac valve opened
12/23/2010	3:35:06 PM	Bypass valve opened
12/23/2010	3:35:06 PM	Helium MFC set to  0.000000
12/23/2010	3:35:06 PM	H2 MFC set to  0.000000
12/23/2010	3:35:06 PM	BCl3 MFC set to  0.000000
12/23/2010	3:35:06 PM	PHl3 MFC set to  0.000000
12/23/2010	3:35:06 PM	SiCl4 MFC set to  0.000000
12/23/2010	3:35:06 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	3:35:07 PM	Tube furnace set to 0
12/23/2010	3:35:08 PM	Run finished at 3:35 PM
12/23/2010	3:35:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/23/2010	4:33:11 PM	Recipe started at 4:33 PM
12/23/2010	4:33:11 PM	Helium valve closed
12/23/2010	4:33:11 PM	BCl3 valve closed
12/23/2010	4:33:11 PM	PH3 valve closed
12/23/2010	4:33:11 PM	SiCl4 pre valve closed
12/23/2010	4:33:11 PM	SiCl4 post valve closed
12/23/2010	4:33:11 PM	Main Vac valve closed
12/23/2010	4:33:11 PM	Bypass valve closed
12/23/2010	4:33:11 PM	Bubbler valve closed
12/23/2010	4:33:11 PM	H2 valve opened
12/23/2010	4:33:11 PM	Helium MFC set to  0.000000
12/23/2010	4:33:11 PM	H2 MFC set to  500.000000
12/23/2010	4:33:11 PM	BCl3 MFC set to  0.000000
12/23/2010	4:33:11 PM	PHl3 MFC set to  0.000000
12/23/2010	4:33:11 PM	SiCl4 MFC set to  0.000000
12/23/2010	4:33:11 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	4:33:11 PM	Tube furnace set to 0
12/23/2010	4:34:31 PM	Helium valve closed
12/23/2010	4:34:31 PM	BCl3 valve closed
12/23/2010	4:34:31 PM	PH3 valve closed
12/23/2010	4:34:31 PM	SiCl4 pre valve closed
12/23/2010	4:34:31 PM	SiCl4 post valve closed
12/23/2010	4:34:31 PM	Main Vac valve closed
12/23/2010	4:34:31 PM	Bypass valve closed
12/23/2010	4:34:31 PM	H2 valve opened
12/23/2010	4:34:31 PM	Bubbler valve opened
12/23/2010	4:34:31 PM	Helium MFC set to  0.000000
12/23/2010	4:34:31 PM	H2 MFC set to  500.000000
12/23/2010	4:34:31 PM	BCl3 MFC set to  0.000000
12/23/2010	4:34:31 PM	PHl3 MFC set to  0.000000
12/23/2010	4:34:31 PM	SiCl4 MFC set to  0.000000
12/23/2010	4:34:31 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	4:34:31 PM	Tube furnace set to 1000
12/23/2010	4:54:31 PM	Helium valve closed
12/23/2010	4:54:31 PM	PH3 valve closed
12/23/2010	4:54:31 PM	Main Vac valve closed
12/23/2010	4:54:31 PM	Bypass valve closed
12/23/2010	4:54:31 PM	H2 valve opened
12/23/2010	4:54:31 PM	BCl3 valve opened
12/23/2010	4:54:31 PM	SiCl4 pre valve opened
12/23/2010	4:54:31 PM	SiCl4 post valve opened
12/23/2010	4:54:31 PM	Bubbler valve opened
12/23/2010	4:54:31 PM	Helium MFC set to  0.000000
12/23/2010	4:54:31 PM	H2 MFC set to  500.000000
12/23/2010	4:54:31 PM	BCl3 MFC set to  12.000000
12/23/2010	4:54:31 PM	PHl3 MFC set to  0.000000
12/23/2010	4:54:31 PM	SiCl4 MFC set to  50.000000
12/23/2010	4:54:31 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	4:54:32 PM	Tube furnace set to 1000
12/23/2010	5:14:32 PM	H2 valve closed
12/23/2010	5:14:32 PM	BCl3 valve closed
12/23/2010	5:14:32 PM	PH3 valve closed
12/23/2010	5:14:32 PM	SiCl4 pre valve closed
12/23/2010	5:14:32 PM	SiCl4 post valve closed
12/23/2010	5:14:32 PM	Main Vac valve closed
12/23/2010	5:14:32 PM	Bypass valve closed
12/23/2010	5:14:32 PM	Helium valve opened
12/23/2010	5:14:32 PM	Bubbler valve opened
12/23/2010	5:14:32 PM	Helium MFC set to  500.000000
12/23/2010	5:14:32 PM	H2 MFC set to  0.000000
12/23/2010	5:14:32 PM	BCl3 MFC set to  0.000000
12/23/2010	5:14:32 PM	PHl3 MFC set to  0.000000
12/23/2010	5:14:32 PM	SiCl4 MFC set to  0.000000
12/23/2010	5:14:32 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	5:14:32 PM	Tube furnace set to 0
12/23/2010	5:34:32 PM	Helium valve closed
12/23/2010	5:34:32 PM	H2 valve closed
12/23/2010	5:34:32 PM	BCl3 valve closed
12/23/2010	5:34:32 PM	PH3 valve closed
12/23/2010	5:34:32 PM	SiCl4 pre valve closed
12/23/2010	5:34:32 PM	SiCl4 post valve closed
12/23/2010	5:34:32 PM	Main Vac valve closed
12/23/2010	5:34:32 PM	Bypass valve closed
12/23/2010	5:34:32 PM	Bubbler valve closed
12/23/2010	5:34:32 PM	Helium MFC set to  0.000000
12/23/2010	5:34:32 PM	H2 MFC set to  0.000000
12/23/2010	5:34:32 PM	BCl3 MFC set to  0.000000
12/23/2010	5:34:32 PM	PHl3 MFC set to  0.000000
12/23/2010	5:34:32 PM	SiCl4 MFC set to  0.000000
12/23/2010	5:34:32 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	5:34:32 PM	Tube furnace set to 0
12/23/2010	5:34:32 PM	Run finished at 5:34 PM
12/23/2010	6:22:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/23/2010	6:22:47 PM	Recipe started at 6:22 PM
12/23/2010	6:22:47 PM	Helium valve closed
12/23/2010	6:22:47 PM	H2 valve closed
12/23/2010	6:22:47 PM	BCl3 valve closed
12/23/2010	6:22:47 PM	PH3 valve closed
12/23/2010	6:22:47 PM	SiCl4 pre valve closed
12/23/2010	6:22:47 PM	SiCl4 post valve closed
12/23/2010	6:22:47 PM	Main Vac valve closed
12/23/2010	6:22:47 PM	Bubbler valve closed
12/23/2010	6:22:47 PM	Bypass valve opened
12/23/2010	6:22:47 PM	Helium MFC set to  0.000000
12/23/2010	6:22:47 PM	H2 MFC set to  0.000000
12/23/2010	6:22:47 PM	BCl3 MFC set to  0.000000
12/23/2010	6:22:47 PM	PHl3 MFC set to  0.000000
12/23/2010	6:22:47 PM	SiCl4 MFC set to  0.000000
12/23/2010	6:22:47 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	6:22:47 PM	Tube furnace set to 0
12/23/2010	6:23:48 PM	Helium valve closed
12/23/2010	6:23:48 PM	H2 valve closed
12/23/2010	6:23:48 PM	BCl3 valve closed
12/23/2010	6:23:48 PM	PH3 valve closed
12/23/2010	6:23:48 PM	SiCl4 pre valve closed
12/23/2010	6:23:48 PM	SiCl4 post valve closed
12/23/2010	6:23:48 PM	Bubbler valve closed
12/23/2010	6:23:48 PM	Main Vac valve opened
12/23/2010	6:23:48 PM	Bypass valve opened
12/23/2010	6:23:48 PM	Helium MFC set to  0.000000
12/23/2010	6:23:48 PM	H2 MFC set to  0.000000
12/23/2010	6:23:48 PM	BCl3 MFC set to  0.000000
12/23/2010	6:23:48 PM	PHl3 MFC set to  0.000000
12/23/2010	6:23:48 PM	SiCl4 MFC set to  0.000000
12/23/2010	6:23:48 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	6:23:48 PM	Tube furnace set to 0
12/23/2010	6:23:48 PM	Run finished at 6:23 PM
12/23/2010	6:23:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/23/2010	6:25:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/23/2010	6:26:00 PM	Recipe started at 6:25 PM
12/23/2010	6:26:00 PM	Helium valve closed
12/23/2010	6:26:00 PM	H2 valve closed
12/23/2010	6:26:00 PM	BCl3 valve closed
12/23/2010	6:26:00 PM	PH3 valve closed
12/23/2010	6:26:00 PM	SiCl4 pre valve closed
12/23/2010	6:26:00 PM	SiCl4 post valve closed
12/23/2010	6:26:00 PM	Main Vac valve closed
12/23/2010	6:26:00 PM	Bubbler valve closed
12/23/2010	6:26:00 PM	Bypass valve opened
12/23/2010	6:26:00 PM	Helium MFC set to  0.000000
12/23/2010	6:26:00 PM	H2 MFC set to  0.000000
12/23/2010	6:26:00 PM	BCl3 MFC set to  0.000000
12/23/2010	6:26:00 PM	PHl3 MFC set to  0.000000
12/23/2010	6:26:00 PM	SiCl4 MFC set to  0.000000
12/23/2010	6:26:00 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	6:26:01 PM	Tube furnace set to 0
12/23/2010	6:26:01 PM	Helium valve closed
12/23/2010	6:26:01 PM	H2 valve closed
12/23/2010	6:26:01 PM	BCl3 valve closed
12/23/2010	6:26:01 PM	PH3 valve closed
12/23/2010	6:26:01 PM	SiCl4 pre valve closed
12/23/2010	6:26:01 PM	SiCl4 post valve closed
12/23/2010	6:26:01 PM	Bubbler valve closed
12/23/2010	6:26:01 PM	Main Vac valve opened
12/23/2010	6:26:01 PM	Bypass valve opened
12/23/2010	6:26:01 PM	Helium MFC set to  0.000000
12/23/2010	6:26:01 PM	H2 MFC set to  0.000000
12/23/2010	6:26:01 PM	BCl3 MFC set to  0.000000
12/23/2010	6:26:01 PM	PHl3 MFC set to  0.000000
12/23/2010	6:26:01 PM	SiCl4 MFC set to  0.000000
12/23/2010	6:26:01 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	6:26:01 PM	Tube furnace set to 0
12/23/2010	6:27:01 PM	H2 valve closed
12/23/2010	6:27:01 PM	BCl3 valve closed
12/23/2010	6:27:01 PM	PH3 valve closed
12/23/2010	6:27:01 PM	SiCl4 pre valve closed
12/23/2010	6:27:01 PM	SiCl4 post valve closed
12/23/2010	6:27:01 PM	Bubbler valve closed
12/23/2010	6:27:01 PM	Helium valve opened
12/23/2010	6:27:01 PM	Main Vac valve opened
12/23/2010	6:27:01 PM	Bypass valve opened
12/23/2010	6:27:01 PM	Helium MFC set to  100.000000
12/23/2010	6:27:01 PM	H2 MFC set to  0.000000
12/23/2010	6:27:01 PM	BCl3 MFC set to  0.000000
12/23/2010	6:27:01 PM	PHl3 MFC set to  0.000000
12/23/2010	6:27:01 PM	SiCl4 MFC set to  0.000000
12/23/2010	6:27:01 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	6:27:01 PM	Tube furnace set to 0
12/23/2010	6:28:01 PM	Helium valve closed
12/23/2010	6:28:01 PM	H2 valve closed
12/23/2010	6:28:01 PM	BCl3 valve closed
12/23/2010	6:28:01 PM	PH3 valve closed
12/23/2010	6:28:01 PM	SiCl4 pre valve closed
12/23/2010	6:28:01 PM	SiCl4 post valve closed
12/23/2010	6:28:01 PM	Bubbler valve closed
12/23/2010	6:28:01 PM	Main Vac valve opened
12/23/2010	6:28:01 PM	Bypass valve opened
12/23/2010	6:28:01 PM	Helium MFC set to  0.000000
12/23/2010	6:28:01 PM	H2 MFC set to  0.000000
12/23/2010	6:28:01 PM	BCl3 MFC set to  0.000000
12/23/2010	6:28:01 PM	PHl3 MFC set to  0.000000
12/23/2010	6:28:01 PM	SiCl4 MFC set to  0.000000
12/23/2010	6:28:01 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	6:28:01 PM	Tube furnace set to 0
12/23/2010	6:29:01 PM	H2 valve closed
12/23/2010	6:29:01 PM	BCl3 valve closed
12/23/2010	6:29:01 PM	PH3 valve closed
12/23/2010	6:29:01 PM	SiCl4 pre valve closed
12/23/2010	6:29:01 PM	SiCl4 post valve closed
12/23/2010	6:29:01 PM	Bubbler valve closed
12/23/2010	6:29:01 PM	Helium valve opened
12/23/2010	6:29:01 PM	Main Vac valve opened
12/23/2010	6:29:01 PM	Bypass valve opened
12/23/2010	6:29:01 PM	Helium MFC set to  100.000000
12/23/2010	6:29:01 PM	H2 MFC set to  0.000000
12/23/2010	6:29:01 PM	BCl3 MFC set to  0.000000
12/23/2010	6:29:01 PM	PHl3 MFC set to  0.000000
12/23/2010	6:29:01 PM	SiCl4 MFC set to  0.000000
12/23/2010	6:29:01 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	6:29:02 PM	Tube furnace set to 0
12/23/2010	6:30:02 PM	Helium valve closed
12/23/2010	6:30:02 PM	H2 valve closed
12/23/2010	6:30:02 PM	BCl3 valve closed
12/23/2010	6:30:02 PM	PH3 valve closed
12/23/2010	6:30:02 PM	SiCl4 pre valve closed
12/23/2010	6:30:02 PM	SiCl4 post valve closed
12/23/2010	6:30:02 PM	Bubbler valve closed
12/23/2010	6:30:02 PM	Main Vac valve opened
12/23/2010	6:30:02 PM	Bypass valve opened
12/23/2010	6:30:02 PM	Helium MFC set to  0.000000
12/23/2010	6:30:02 PM	H2 MFC set to  0.000000
12/23/2010	6:30:02 PM	BCl3 MFC set to  0.000000
12/23/2010	6:30:02 PM	PHl3 MFC set to  0.000000
12/23/2010	6:30:02 PM	SiCl4 MFC set to  0.000000
12/23/2010	6:30:02 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	6:30:02 PM	Tube furnace set to 0
12/23/2010	6:31:02 PM	H2 valve closed
12/23/2010	6:31:02 PM	BCl3 valve closed
12/23/2010	6:31:02 PM	PH3 valve closed
12/23/2010	6:31:02 PM	SiCl4 pre valve closed
12/23/2010	6:31:02 PM	SiCl4 post valve closed
12/23/2010	6:31:02 PM	Bubbler valve closed
12/23/2010	6:31:02 PM	Helium valve opened
12/23/2010	6:31:02 PM	Main Vac valve opened
12/23/2010	6:31:02 PM	Bypass valve opened
12/23/2010	6:31:02 PM	Helium MFC set to  100.000000
12/23/2010	6:31:02 PM	H2 MFC set to  0.000000
12/23/2010	6:31:02 PM	BCl3 MFC set to  0.000000
12/23/2010	6:31:02 PM	PHl3 MFC set to  0.000000
12/23/2010	6:31:02 PM	SiCl4 MFC set to  0.000000
12/23/2010	6:31:02 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	6:31:02 PM	Tube furnace set to 0
12/23/2010	6:32:02 PM	Helium valve closed
12/23/2010	6:32:02 PM	H2 valve closed
12/23/2010	6:32:02 PM	BCl3 valve closed
12/23/2010	6:32:02 PM	PH3 valve closed
12/23/2010	6:32:02 PM	SiCl4 pre valve closed
12/23/2010	6:32:02 PM	SiCl4 post valve closed
12/23/2010	6:32:02 PM	Bubbler valve closed
12/23/2010	6:32:02 PM	Main Vac valve opened
12/23/2010	6:32:02 PM	Bypass valve opened
12/23/2010	6:32:02 PM	Helium MFC set to  0.000000
12/23/2010	6:32:02 PM	H2 MFC set to  0.000000
12/23/2010	6:32:02 PM	BCl3 MFC set to  0.000000
12/23/2010	6:32:02 PM	PHl3 MFC set to  0.000000
12/23/2010	6:32:02 PM	SiCl4 MFC set to  0.000000
12/23/2010	6:32:02 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	6:32:02 PM	Tube furnace set to 0
12/23/2010	6:33:02 PM	H2 valve closed
12/23/2010	6:33:02 PM	BCl3 valve closed
12/23/2010	6:33:02 PM	PH3 valve closed
12/23/2010	6:33:02 PM	SiCl4 pre valve closed
12/23/2010	6:33:02 PM	SiCl4 post valve closed
12/23/2010	6:33:02 PM	Bubbler valve closed
12/23/2010	6:33:02 PM	Helium valve opened
12/23/2010	6:33:02 PM	Main Vac valve opened
12/23/2010	6:33:02 PM	Bypass valve opened
12/23/2010	6:33:02 PM	Helium MFC set to  100.000000
12/23/2010	6:33:02 PM	H2 MFC set to  0.000000
12/23/2010	6:33:02 PM	BCl3 MFC set to  0.000000
12/23/2010	6:33:02 PM	PHl3 MFC set to  0.000000
12/23/2010	6:33:02 PM	SiCl4 MFC set to  0.000000
12/23/2010	6:33:02 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	6:33:02 PM	Tube furnace set to 0
12/23/2010	6:34:02 PM	Helium valve closed
12/23/2010	6:34:02 PM	H2 valve closed
12/23/2010	6:34:02 PM	BCl3 valve closed
12/23/2010	6:34:02 PM	PH3 valve closed
12/23/2010	6:34:02 PM	SiCl4 pre valve closed
12/23/2010	6:34:02 PM	SiCl4 post valve closed
12/23/2010	6:34:02 PM	Bubbler valve closed
12/23/2010	6:34:02 PM	Main Vac valve opened
12/23/2010	6:34:02 PM	Bypass valve opened
12/23/2010	6:34:02 PM	Helium MFC set to  0.000000
12/23/2010	6:34:02 PM	H2 MFC set to  0.000000
12/23/2010	6:34:02 PM	BCl3 MFC set to  0.000000
12/23/2010	6:34:02 PM	PHl3 MFC set to  0.000000
12/23/2010	6:34:02 PM	SiCl4 MFC set to  0.000000
12/23/2010	6:34:02 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	6:34:03 PM	Tube furnace set to 0
12/23/2010	6:35:03 PM	H2 valve closed
12/23/2010	6:35:03 PM	BCl3 valve closed
12/23/2010	6:35:03 PM	PH3 valve closed
12/23/2010	6:35:03 PM	SiCl4 pre valve closed
12/23/2010	6:35:03 PM	SiCl4 post valve closed
12/23/2010	6:35:03 PM	Bubbler valve closed
12/23/2010	6:35:03 PM	Helium valve opened
12/23/2010	6:35:03 PM	Main Vac valve opened
12/23/2010	6:35:03 PM	Bypass valve opened
12/23/2010	6:35:03 PM	Helium MFC set to  100.000000
12/23/2010	6:35:03 PM	H2 MFC set to  0.000000
12/23/2010	6:35:03 PM	BCl3 MFC set to  0.000000
12/23/2010	6:35:03 PM	PHl3 MFC set to  0.000000
12/23/2010	6:35:03 PM	SiCl4 MFC set to  0.000000
12/23/2010	6:35:03 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	6:35:03 PM	Tube furnace set to 0
12/23/2010	6:36:03 PM	Helium valve closed
12/23/2010	6:36:03 PM	H2 valve closed
12/23/2010	6:36:03 PM	BCl3 valve closed
12/23/2010	6:36:03 PM	PH3 valve closed
12/23/2010	6:36:03 PM	SiCl4 pre valve closed
12/23/2010	6:36:03 PM	SiCl4 post valve closed
12/23/2010	6:36:03 PM	Bubbler valve closed
12/23/2010	6:36:03 PM	Main Vac valve opened
12/23/2010	6:36:03 PM	Bypass valve opened
12/23/2010	6:36:03 PM	Helium MFC set to  0.000000
12/23/2010	6:36:03 PM	H2 MFC set to  0.000000
12/23/2010	6:36:03 PM	BCl3 MFC set to  0.000000
12/23/2010	6:36:03 PM	PHl3 MFC set to  0.000000
12/23/2010	6:36:03 PM	SiCl4 MFC set to  0.000000
12/23/2010	6:36:03 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	6:36:03 PM	Tube furnace set to 0
12/23/2010	6:37:03 PM	H2 valve closed
12/23/2010	6:37:03 PM	BCl3 valve closed
12/23/2010	6:37:03 PM	PH3 valve closed
12/23/2010	6:37:03 PM	SiCl4 pre valve closed
12/23/2010	6:37:03 PM	SiCl4 post valve closed
12/23/2010	6:37:03 PM	Bubbler valve closed
12/23/2010	6:37:03 PM	Helium valve opened
12/23/2010	6:37:03 PM	Main Vac valve opened
12/23/2010	6:37:03 PM	Bypass valve opened
12/23/2010	6:37:03 PM	Helium MFC set to  100.000000
12/23/2010	6:37:03 PM	H2 MFC set to  0.000000
12/23/2010	6:37:03 PM	BCl3 MFC set to  0.000000
12/23/2010	6:37:03 PM	PHl3 MFC set to  0.000000
12/23/2010	6:37:03 PM	SiCl4 MFC set to  0.000000
12/23/2010	6:37:03 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	6:37:03 PM	Tube furnace set to 0
12/23/2010	6:38:03 PM	Helium valve closed
12/23/2010	6:38:03 PM	H2 valve closed
12/23/2010	6:38:03 PM	BCl3 valve closed
12/23/2010	6:38:03 PM	PH3 valve closed
12/23/2010	6:38:03 PM	SiCl4 pre valve closed
12/23/2010	6:38:03 PM	SiCl4 post valve closed
12/23/2010	6:38:03 PM	Bubbler valve closed
12/23/2010	6:38:03 PM	Main Vac valve opened
12/23/2010	6:38:03 PM	Bypass valve opened
12/23/2010	6:38:03 PM	Helium MFC set to  0.000000
12/23/2010	6:38:03 PM	H2 MFC set to  0.000000
12/23/2010	6:38:03 PM	BCl3 MFC set to  0.000000
12/23/2010	6:38:03 PM	PHl3 MFC set to  0.000000
12/23/2010	6:38:03 PM	SiCl4 MFC set to  0.000000
12/23/2010	6:38:03 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	6:38:03 PM	Tube furnace set to 0
12/23/2010	6:39:03 PM	H2 valve closed
12/23/2010	6:39:03 PM	BCl3 valve closed
12/23/2010	6:39:03 PM	PH3 valve closed
12/23/2010	6:39:03 PM	SiCl4 pre valve closed
12/23/2010	6:39:03 PM	SiCl4 post valve closed
12/23/2010	6:39:03 PM	Bubbler valve closed
12/23/2010	6:39:03 PM	Helium valve opened
12/23/2010	6:39:03 PM	Main Vac valve opened
12/23/2010	6:39:03 PM	Bypass valve opened
12/23/2010	6:39:03 PM	Helium MFC set to  100.000000
12/23/2010	6:39:03 PM	H2 MFC set to  0.000000
12/23/2010	6:39:03 PM	BCl3 MFC set to  0.000000
12/23/2010	6:39:03 PM	PHl3 MFC set to  0.000000
12/23/2010	6:39:03 PM	SiCl4 MFC set to  0.000000
12/23/2010	6:39:03 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	6:39:04 PM	Tube furnace set to 0
12/23/2010	6:40:04 PM	Helium valve closed
12/23/2010	6:40:04 PM	H2 valve closed
12/23/2010	6:40:04 PM	BCl3 valve closed
12/23/2010	6:40:04 PM	PH3 valve closed
12/23/2010	6:40:04 PM	SiCl4 pre valve closed
12/23/2010	6:40:04 PM	SiCl4 post valve closed
12/23/2010	6:40:04 PM	Bubbler valve closed
12/23/2010	6:40:04 PM	Main Vac valve opened
12/23/2010	6:40:04 PM	Bypass valve opened
12/23/2010	6:40:04 PM	Helium MFC set to  0.000000
12/23/2010	6:40:04 PM	H2 MFC set to  0.000000
12/23/2010	6:40:04 PM	BCl3 MFC set to  0.000000
12/23/2010	6:40:04 PM	PHl3 MFC set to  0.000000
12/23/2010	6:40:04 PM	SiCl4 MFC set to  0.000000
12/23/2010	6:40:04 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	6:40:04 PM	Tube furnace set to 0
12/23/2010	6:41:04 PM	H2 valve closed
12/23/2010	6:41:04 PM	BCl3 valve closed
12/23/2010	6:41:04 PM	PH3 valve closed
12/23/2010	6:41:04 PM	SiCl4 pre valve closed
12/23/2010	6:41:04 PM	SiCl4 post valve closed
12/23/2010	6:41:04 PM	Bubbler valve closed
12/23/2010	6:41:04 PM	Helium valve opened
12/23/2010	6:41:04 PM	Main Vac valve opened
12/23/2010	6:41:04 PM	Bypass valve opened
12/23/2010	6:41:04 PM	Helium MFC set to  100.000000
12/23/2010	6:41:04 PM	H2 MFC set to  0.000000
12/23/2010	6:41:04 PM	BCl3 MFC set to  0.000000
12/23/2010	6:41:04 PM	PHl3 MFC set to  0.000000
12/23/2010	6:41:04 PM	SiCl4 MFC set to  0.000000
12/23/2010	6:41:04 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	6:41:04 PM	Tube furnace set to 0
12/23/2010	6:42:04 PM	Helium valve closed
12/23/2010	6:42:04 PM	H2 valve closed
12/23/2010	6:42:04 PM	BCl3 valve closed
12/23/2010	6:42:04 PM	PH3 valve closed
12/23/2010	6:42:04 PM	SiCl4 pre valve closed
12/23/2010	6:42:04 PM	SiCl4 post valve closed
12/23/2010	6:42:04 PM	Bubbler valve closed
12/23/2010	6:42:04 PM	Main Vac valve opened
12/23/2010	6:42:04 PM	Bypass valve opened
12/23/2010	6:42:04 PM	Helium MFC set to  0.000000
12/23/2010	6:42:04 PM	H2 MFC set to  0.000000
12/23/2010	6:42:04 PM	BCl3 MFC set to  0.000000
12/23/2010	6:42:04 PM	PHl3 MFC set to  0.000000
12/23/2010	6:42:04 PM	SiCl4 MFC set to  0.000000
12/23/2010	6:42:04 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	6:42:04 PM	Tube furnace set to 0
12/23/2010	6:43:04 PM	H2 valve closed
12/23/2010	6:43:04 PM	BCl3 valve closed
12/23/2010	6:43:04 PM	PH3 valve closed
12/23/2010	6:43:04 PM	SiCl4 pre valve closed
12/23/2010	6:43:04 PM	SiCl4 post valve closed
12/23/2010	6:43:04 PM	Bubbler valve closed
12/23/2010	6:43:04 PM	Helium valve opened
12/23/2010	6:43:04 PM	Main Vac valve opened
12/23/2010	6:43:04 PM	Bypass valve opened
12/23/2010	6:43:04 PM	Helium MFC set to  100.000000
12/23/2010	6:43:04 PM	H2 MFC set to  0.000000
12/23/2010	6:43:04 PM	BCl3 MFC set to  0.000000
12/23/2010	6:43:04 PM	PHl3 MFC set to  0.000000
12/23/2010	6:43:04 PM	SiCl4 MFC set to  0.000000
12/23/2010	6:43:04 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	6:43:04 PM	Tube furnace set to 0
12/23/2010	6:44:04 PM	Helium valve closed
12/23/2010	6:44:04 PM	H2 valve closed
12/23/2010	6:44:04 PM	BCl3 valve closed
12/23/2010	6:44:04 PM	PH3 valve closed
12/23/2010	6:44:04 PM	SiCl4 pre valve closed
12/23/2010	6:44:04 PM	SiCl4 post valve closed
12/23/2010	6:44:04 PM	Bubbler valve closed
12/23/2010	6:44:04 PM	Main Vac valve opened
12/23/2010	6:44:04 PM	Bypass valve opened
12/23/2010	6:44:04 PM	Helium MFC set to  0.000000
12/23/2010	6:44:04 PM	H2 MFC set to  0.000000
12/23/2010	6:44:04 PM	BCl3 MFC set to  0.000000
12/23/2010	6:44:04 PM	PHl3 MFC set to  0.000000
12/23/2010	6:44:04 PM	SiCl4 MFC set to  0.000000
12/23/2010	6:44:04 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	6:44:05 PM	Tube furnace set to 0
12/23/2010	6:45:05 PM	H2 valve closed
12/23/2010	6:45:05 PM	BCl3 valve closed
12/23/2010	6:45:05 PM	PH3 valve closed
12/23/2010	6:45:05 PM	SiCl4 pre valve closed
12/23/2010	6:45:05 PM	SiCl4 post valve closed
12/23/2010	6:45:05 PM	Bubbler valve closed
12/23/2010	6:45:05 PM	Helium valve opened
12/23/2010	6:45:05 PM	Main Vac valve opened
12/23/2010	6:45:05 PM	Bypass valve opened
12/23/2010	6:45:05 PM	Helium MFC set to  100.000000
12/23/2010	6:45:05 PM	H2 MFC set to  0.000000
12/23/2010	6:45:05 PM	BCl3 MFC set to  0.000000
12/23/2010	6:45:05 PM	PHl3 MFC set to  0.000000
12/23/2010	6:45:05 PM	SiCl4 MFC set to  0.000000
12/23/2010	6:45:05 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	6:45:05 PM	Tube furnace set to 0
12/23/2010	6:46:05 PM	Helium valve closed
12/23/2010	6:46:05 PM	H2 valve closed
12/23/2010	6:46:05 PM	BCl3 valve closed
12/23/2010	6:46:05 PM	PH3 valve closed
12/23/2010	6:46:05 PM	SiCl4 pre valve closed
12/23/2010	6:46:05 PM	SiCl4 post valve closed
12/23/2010	6:46:05 PM	Bubbler valve closed
12/23/2010	6:46:05 PM	Main Vac valve opened
12/23/2010	6:46:05 PM	Bypass valve opened
12/23/2010	6:46:05 PM	Helium MFC set to  0.000000
12/23/2010	6:46:05 PM	H2 MFC set to  0.000000
12/23/2010	6:46:05 PM	BCl3 MFC set to  0.000000
12/23/2010	6:46:05 PM	PHl3 MFC set to  0.000000
12/23/2010	6:46:05 PM	SiCl4 MFC set to  0.000000
12/23/2010	6:46:05 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	6:46:05 PM	Tube furnace set to 0
12/23/2010	6:46:06 PM	Run finished at 6:46 PM
12/23/2010	6:46:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/23/2010	8:50:24 PM	Recipe started at 8:50 PM
12/23/2010	8:50:24 PM	Helium valve closed
12/23/2010	8:50:24 PM	BCl3 valve closed
12/23/2010	8:50:24 PM	PH3 valve closed
12/23/2010	8:50:24 PM	SiCl4 pre valve closed
12/23/2010	8:50:24 PM	SiCl4 post valve closed
12/23/2010	8:50:24 PM	Main Vac valve closed
12/23/2010	8:50:24 PM	Bypass valve closed
12/23/2010	8:50:24 PM	Bubbler valve closed
12/23/2010	8:50:24 PM	H2 valve opened
12/23/2010	8:50:24 PM	Helium MFC set to  0.000000
12/23/2010	8:50:24 PM	H2 MFC set to  500.000000
12/23/2010	8:50:24 PM	BCl3 MFC set to  0.000000
12/23/2010	8:50:24 PM	PHl3 MFC set to  0.000000
12/23/2010	8:50:24 PM	SiCl4 MFC set to  0.000000
12/23/2010	8:50:24 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	8:50:24 PM	Tube furnace set to 0
12/23/2010	8:51:45 PM	Helium valve closed
12/23/2010	8:51:45 PM	BCl3 valve closed
12/23/2010	8:51:45 PM	PH3 valve closed
12/23/2010	8:51:45 PM	SiCl4 pre valve closed
12/23/2010	8:51:45 PM	SiCl4 post valve closed
12/23/2010	8:51:45 PM	Main Vac valve closed
12/23/2010	8:51:45 PM	Bypass valve closed
12/23/2010	8:51:45 PM	H2 valve opened
12/23/2010	8:51:45 PM	Bubbler valve opened
12/23/2010	8:51:45 PM	Helium MFC set to  0.000000
12/23/2010	8:51:45 PM	H2 MFC set to  500.000000
12/23/2010	8:51:45 PM	BCl3 MFC set to  0.000000
12/23/2010	8:51:45 PM	PHl3 MFC set to  0.000000
12/23/2010	8:51:45 PM	SiCl4 MFC set to  0.000000
12/23/2010	8:51:45 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	8:51:45 PM	Tube furnace set to 1000
12/23/2010	9:11:45 PM	Helium valve closed
12/23/2010	9:11:45 PM	PH3 valve closed
12/23/2010	9:11:45 PM	Main Vac valve closed
12/23/2010	9:11:45 PM	Bypass valve closed
12/23/2010	9:11:45 PM	H2 valve opened
12/23/2010	9:11:45 PM	BCl3 valve opened
12/23/2010	9:11:45 PM	SiCl4 pre valve opened
12/23/2010	9:11:45 PM	SiCl4 post valve opened
12/23/2010	9:11:45 PM	Bubbler valve opened
12/23/2010	9:11:45 PM	Helium MFC set to  0.000000
12/23/2010	9:11:45 PM	H2 MFC set to  500.000000
12/23/2010	9:11:45 PM	BCl3 MFC set to  12.000000
12/23/2010	9:11:45 PM	PHl3 MFC set to  0.000000
12/23/2010	9:11:45 PM	SiCl4 MFC set to  50.000000
12/23/2010	9:11:45 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	9:11:45 PM	Tube furnace set to 1000
12/23/2010	9:31:45 PM	H2 valve closed
12/23/2010	9:31:45 PM	BCl3 valve closed
12/23/2010	9:31:45 PM	PH3 valve closed
12/23/2010	9:31:45 PM	SiCl4 pre valve closed
12/23/2010	9:31:45 PM	SiCl4 post valve closed
12/23/2010	9:31:45 PM	Main Vac valve closed
12/23/2010	9:31:45 PM	Bypass valve closed
12/23/2010	9:31:45 PM	Helium valve opened
12/23/2010	9:31:45 PM	Bubbler valve opened
12/23/2010	9:31:45 PM	Helium MFC set to  500.000000
12/23/2010	9:31:45 PM	H2 MFC set to  0.000000
12/23/2010	9:31:45 PM	BCl3 MFC set to  0.000000
12/23/2010	9:31:45 PM	PHl3 MFC set to  0.000000
12/23/2010	9:31:45 PM	SiCl4 MFC set to  0.000000
12/23/2010	9:31:45 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	9:31:45 PM	Tube furnace set to 0
12/23/2010	9:51:45 PM	Helium valve closed
12/23/2010	9:51:45 PM	H2 valve closed
12/23/2010	9:51:45 PM	BCl3 valve closed
12/23/2010	9:51:45 PM	PH3 valve closed
12/23/2010	9:51:45 PM	SiCl4 pre valve closed
12/23/2010	9:51:45 PM	SiCl4 post valve closed
12/23/2010	9:51:45 PM	Main Vac valve closed
12/23/2010	9:51:45 PM	Bypass valve closed
12/23/2010	9:51:46 PM	Bubbler valve closed
12/23/2010	9:51:46 PM	Helium MFC set to  0.000000
12/23/2010	9:51:46 PM	H2 MFC set to  0.000000
12/23/2010	9:51:46 PM	BCl3 MFC set to  0.000000
12/23/2010	9:51:46 PM	PHl3 MFC set to  0.000000
12/23/2010	9:51:46 PM	SiCl4 MFC set to  0.000000
12/23/2010	9:51:46 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	9:51:46 PM	Tube furnace set to 0
12/23/2010	9:51:46 PM	Run finished at 9:51 PM
12/23/2010	10:03:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/23/2010	10:04:00 PM	Recipe started at 10:03 PM
12/23/2010	10:04:00 PM	Helium valve closed
12/23/2010	10:04:00 PM	H2 valve closed
12/23/2010	10:04:00 PM	BCl3 valve closed
12/23/2010	10:04:00 PM	PH3 valve closed
12/23/2010	10:04:00 PM	SiCl4 pre valve closed
12/23/2010	10:04:00 PM	SiCl4 post valve closed
12/23/2010	10:04:00 PM	Main Vac valve closed
12/23/2010	10:04:00 PM	Bubbler valve closed
12/23/2010	10:04:00 PM	Bypass valve opened
12/23/2010	10:04:00 PM	Helium MFC set to  0.000000
12/23/2010	10:04:00 PM	H2 MFC set to  0.000000
12/23/2010	10:04:00 PM	BCl3 MFC set to  0.000000
12/23/2010	10:04:00 PM	PHl3 MFC set to  0.000000
12/23/2010	10:04:00 PM	SiCl4 MFC set to  0.000000
12/23/2010	10:04:00 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	10:04:00 PM	Tube furnace set to 0
12/23/2010	10:04:56 PM	Helium valve closed
12/23/2010	10:04:56 PM	H2 valve closed
12/23/2010	10:04:56 PM	BCl3 valve closed
12/23/2010	10:04:56 PM	PH3 valve closed
12/23/2010	10:04:56 PM	SiCl4 pre valve closed
12/23/2010	10:04:56 PM	SiCl4 post valve closed
12/23/2010	10:04:56 PM	Bubbler valve closed
12/23/2010	10:04:56 PM	Main Vac valve opened
12/23/2010	10:04:56 PM	Bypass valve opened
12/23/2010	10:04:56 PM	Helium MFC set to  0.000000
12/23/2010	10:04:56 PM	H2 MFC set to  0.000000
12/23/2010	10:04:56 PM	BCl3 MFC set to  0.000000
12/23/2010	10:04:56 PM	PHl3 MFC set to  0.000000
12/23/2010	10:04:56 PM	SiCl4 MFC set to  0.000000
12/23/2010	10:04:56 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	10:04:56 PM	Tube furnace set to 0
12/23/2010	10:04:57 PM	Run finished at 10:04 PM
12/23/2010	10:04:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/23/2010	10:05:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/23/2010	10:05:14 PM	Recipe started at 10:05 PM
12/23/2010	10:05:14 PM	Helium valve closed
12/23/2010	10:05:14 PM	H2 valve closed
12/23/2010	10:05:14 PM	BCl3 valve closed
12/23/2010	10:05:14 PM	PH3 valve closed
12/23/2010	10:05:14 PM	SiCl4 pre valve closed
12/23/2010	10:05:14 PM	SiCl4 post valve closed
12/23/2010	10:05:14 PM	Main Vac valve closed
12/23/2010	10:05:14 PM	Bubbler valve closed
12/23/2010	10:05:14 PM	Bypass valve opened
12/23/2010	10:05:14 PM	Helium MFC set to  0.000000
12/23/2010	10:05:14 PM	H2 MFC set to  0.000000
12/23/2010	10:05:14 PM	BCl3 MFC set to  0.000000
12/23/2010	10:05:14 PM	PHl3 MFC set to  0.000000
12/23/2010	10:05:14 PM	SiCl4 MFC set to  0.000000
12/23/2010	10:05:14 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	10:05:14 PM	Tube furnace set to 0
12/23/2010	10:05:15 PM	Helium valve closed
12/23/2010	10:05:15 PM	H2 valve closed
12/23/2010	10:05:15 PM	BCl3 valve closed
12/23/2010	10:05:15 PM	PH3 valve closed
12/23/2010	10:05:15 PM	SiCl4 pre valve closed
12/23/2010	10:05:15 PM	SiCl4 post valve closed
12/23/2010	10:05:15 PM	Bubbler valve closed
12/23/2010	10:05:15 PM	Main Vac valve opened
12/23/2010	10:05:15 PM	Bypass valve opened
12/23/2010	10:05:15 PM	Helium MFC set to  0.000000
12/23/2010	10:05:15 PM	H2 MFC set to  0.000000
12/23/2010	10:05:15 PM	BCl3 MFC set to  0.000000
12/23/2010	10:05:15 PM	PHl3 MFC set to  0.000000
12/23/2010	10:05:15 PM	SiCl4 MFC set to  0.000000
12/23/2010	10:05:15 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	10:05:15 PM	Tube furnace set to 0
12/23/2010	10:06:15 PM	H2 valve closed
12/23/2010	10:06:15 PM	BCl3 valve closed
12/23/2010	10:06:15 PM	PH3 valve closed
12/23/2010	10:06:15 PM	SiCl4 pre valve closed
12/23/2010	10:06:15 PM	SiCl4 post valve closed
12/23/2010	10:06:15 PM	Bubbler valve closed
12/23/2010	10:06:15 PM	Helium valve opened
12/23/2010	10:06:15 PM	Main Vac valve opened
12/23/2010	10:06:15 PM	Bypass valve opened
12/23/2010	10:06:15 PM	Helium MFC set to  100.000000
12/23/2010	10:06:15 PM	H2 MFC set to  0.000000
12/23/2010	10:06:15 PM	BCl3 MFC set to  0.000000
12/23/2010	10:06:15 PM	PHl3 MFC set to  0.000000
12/23/2010	10:06:15 PM	SiCl4 MFC set to  0.000000
12/23/2010	10:06:15 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	10:06:15 PM	Tube furnace set to 0
12/23/2010	10:07:15 PM	Helium valve closed
12/23/2010	10:07:15 PM	H2 valve closed
12/23/2010	10:07:15 PM	BCl3 valve closed
12/23/2010	10:07:15 PM	PH3 valve closed
12/23/2010	10:07:15 PM	SiCl4 pre valve closed
12/23/2010	10:07:15 PM	SiCl4 post valve closed
12/23/2010	10:07:15 PM	Bubbler valve closed
12/23/2010	10:07:15 PM	Main Vac valve opened
12/23/2010	10:07:15 PM	Bypass valve opened
12/23/2010	10:07:15 PM	Helium MFC set to  0.000000
12/23/2010	10:07:15 PM	H2 MFC set to  0.000000
12/23/2010	10:07:15 PM	BCl3 MFC set to  0.000000
12/23/2010	10:07:15 PM	PHl3 MFC set to  0.000000
12/23/2010	10:07:15 PM	SiCl4 MFC set to  0.000000
12/23/2010	10:07:15 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	10:07:15 PM	Tube furnace set to 0
12/23/2010	10:08:15 PM	H2 valve closed
12/23/2010	10:08:15 PM	BCl3 valve closed
12/23/2010	10:08:15 PM	PH3 valve closed
12/23/2010	10:08:15 PM	SiCl4 pre valve closed
12/23/2010	10:08:15 PM	SiCl4 post valve closed
12/23/2010	10:08:15 PM	Bubbler valve closed
12/23/2010	10:08:15 PM	Helium valve opened
12/23/2010	10:08:15 PM	Main Vac valve opened
12/23/2010	10:08:15 PM	Bypass valve opened
12/23/2010	10:08:15 PM	Helium MFC set to  100.000000
12/23/2010	10:08:15 PM	H2 MFC set to  0.000000
12/23/2010	10:08:15 PM	BCl3 MFC set to  0.000000
12/23/2010	10:08:15 PM	PHl3 MFC set to  0.000000
12/23/2010	10:08:15 PM	SiCl4 MFC set to  0.000000
12/23/2010	10:08:15 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	10:08:15 PM	Tube furnace set to 0
12/23/2010	10:09:15 PM	Helium valve closed
12/23/2010	10:09:15 PM	H2 valve closed
12/23/2010	10:09:15 PM	BCl3 valve closed
12/23/2010	10:09:15 PM	PH3 valve closed
12/23/2010	10:09:15 PM	SiCl4 pre valve closed
12/23/2010	10:09:15 PM	SiCl4 post valve closed
12/23/2010	10:09:15 PM	Bubbler valve closed
12/23/2010	10:09:15 PM	Main Vac valve opened
12/23/2010	10:09:15 PM	Bypass valve opened
12/23/2010	10:09:15 PM	Helium MFC set to  0.000000
12/23/2010	10:09:15 PM	H2 MFC set to  0.000000
12/23/2010	10:09:15 PM	BCl3 MFC set to  0.000000
12/23/2010	10:09:15 PM	PHl3 MFC set to  0.000000
12/23/2010	10:09:15 PM	SiCl4 MFC set to  0.000000
12/23/2010	10:09:15 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	10:09:16 PM	Tube furnace set to 0
12/23/2010	10:10:16 PM	H2 valve closed
12/23/2010	10:10:16 PM	BCl3 valve closed
12/23/2010	10:10:16 PM	PH3 valve closed
12/23/2010	10:10:16 PM	SiCl4 pre valve closed
12/23/2010	10:10:16 PM	SiCl4 post valve closed
12/23/2010	10:10:16 PM	Bubbler valve closed
12/23/2010	10:10:16 PM	Helium valve opened
12/23/2010	10:10:16 PM	Main Vac valve opened
12/23/2010	10:10:16 PM	Bypass valve opened
12/23/2010	10:10:16 PM	Helium MFC set to  100.000000
12/23/2010	10:10:16 PM	H2 MFC set to  0.000000
12/23/2010	10:10:16 PM	BCl3 MFC set to  0.000000
12/23/2010	10:10:16 PM	PHl3 MFC set to  0.000000
12/23/2010	10:10:16 PM	SiCl4 MFC set to  0.000000
12/23/2010	10:10:16 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	10:10:16 PM	Tube furnace set to 0
12/23/2010	10:11:16 PM	Helium valve closed
12/23/2010	10:11:16 PM	H2 valve closed
12/23/2010	10:11:16 PM	BCl3 valve closed
12/23/2010	10:11:16 PM	PH3 valve closed
12/23/2010	10:11:16 PM	SiCl4 pre valve closed
12/23/2010	10:11:16 PM	SiCl4 post valve closed
12/23/2010	10:11:16 PM	Bubbler valve closed
12/23/2010	10:11:16 PM	Main Vac valve opened
12/23/2010	10:11:16 PM	Bypass valve opened
12/23/2010	10:11:16 PM	Helium MFC set to  0.000000
12/23/2010	10:11:16 PM	H2 MFC set to  0.000000
12/23/2010	10:11:16 PM	BCl3 MFC set to  0.000000
12/23/2010	10:11:16 PM	PHl3 MFC set to  0.000000
12/23/2010	10:11:16 PM	SiCl4 MFC set to  0.000000
12/23/2010	10:11:16 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	10:11:16 PM	Tube furnace set to 0
12/23/2010	10:12:16 PM	H2 valve closed
12/23/2010	10:12:16 PM	BCl3 valve closed
12/23/2010	10:12:16 PM	PH3 valve closed
12/23/2010	10:12:16 PM	SiCl4 pre valve closed
12/23/2010	10:12:16 PM	SiCl4 post valve closed
12/23/2010	10:12:16 PM	Bubbler valve closed
12/23/2010	10:12:16 PM	Helium valve opened
12/23/2010	10:12:16 PM	Main Vac valve opened
12/23/2010	10:12:16 PM	Bypass valve opened
12/23/2010	10:12:16 PM	Helium MFC set to  100.000000
12/23/2010	10:12:16 PM	H2 MFC set to  0.000000
12/23/2010	10:12:16 PM	BCl3 MFC set to  0.000000
12/23/2010	10:12:16 PM	PHl3 MFC set to  0.000000
12/23/2010	10:12:16 PM	SiCl4 MFC set to  0.000000
12/23/2010	10:12:16 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	10:12:16 PM	Tube furnace set to 0
12/23/2010	10:13:16 PM	Helium valve closed
12/23/2010	10:13:16 PM	H2 valve closed
12/23/2010	10:13:16 PM	BCl3 valve closed
12/23/2010	10:13:16 PM	PH3 valve closed
12/23/2010	10:13:16 PM	SiCl4 pre valve closed
12/23/2010	10:13:16 PM	SiCl4 post valve closed
12/23/2010	10:13:16 PM	Bubbler valve closed
12/23/2010	10:13:16 PM	Main Vac valve opened
12/23/2010	10:13:16 PM	Bypass valve opened
12/23/2010	10:13:16 PM	Helium MFC set to  0.000000
12/23/2010	10:13:16 PM	H2 MFC set to  0.000000
12/23/2010	10:13:16 PM	BCl3 MFC set to  0.000000
12/23/2010	10:13:16 PM	PHl3 MFC set to  0.000000
12/23/2010	10:13:16 PM	SiCl4 MFC set to  0.000000
12/23/2010	10:13:16 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	10:13:16 PM	Tube furnace set to 0
12/23/2010	10:14:16 PM	H2 valve closed
12/23/2010	10:14:16 PM	BCl3 valve closed
12/23/2010	10:14:16 PM	PH3 valve closed
12/23/2010	10:14:16 PM	SiCl4 pre valve closed
12/23/2010	10:14:16 PM	SiCl4 post valve closed
12/23/2010	10:14:16 PM	Bubbler valve closed
12/23/2010	10:14:16 PM	Helium valve opened
12/23/2010	10:14:16 PM	Main Vac valve opened
12/23/2010	10:14:16 PM	Bypass valve opened
12/23/2010	10:14:16 PM	Helium MFC set to  100.000000
12/23/2010	10:14:16 PM	H2 MFC set to  0.000000
12/23/2010	10:14:16 PM	BCl3 MFC set to  0.000000
12/23/2010	10:14:16 PM	PHl3 MFC set to  0.000000
12/23/2010	10:14:16 PM	SiCl4 MFC set to  0.000000
12/23/2010	10:14:16 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	10:14:17 PM	Tube furnace set to 0
12/23/2010	10:15:17 PM	Helium valve closed
12/23/2010	10:15:17 PM	H2 valve closed
12/23/2010	10:15:17 PM	BCl3 valve closed
12/23/2010	10:15:17 PM	PH3 valve closed
12/23/2010	10:15:17 PM	SiCl4 pre valve closed
12/23/2010	10:15:17 PM	SiCl4 post valve closed
12/23/2010	10:15:17 PM	Bubbler valve closed
12/23/2010	10:15:17 PM	Main Vac valve opened
12/23/2010	10:15:17 PM	Bypass valve opened
12/23/2010	10:15:17 PM	Helium MFC set to  0.000000
12/23/2010	10:15:17 PM	H2 MFC set to  0.000000
12/23/2010	10:15:17 PM	BCl3 MFC set to  0.000000
12/23/2010	10:15:17 PM	PHl3 MFC set to  0.000000
12/23/2010	10:15:17 PM	SiCl4 MFC set to  0.000000
12/23/2010	10:15:17 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	10:15:17 PM	Tube furnace set to 0
12/23/2010	10:16:17 PM	H2 valve closed
12/23/2010	10:16:17 PM	BCl3 valve closed
12/23/2010	10:16:17 PM	PH3 valve closed
12/23/2010	10:16:17 PM	SiCl4 pre valve closed
12/23/2010	10:16:17 PM	SiCl4 post valve closed
12/23/2010	10:16:17 PM	Bubbler valve closed
12/23/2010	10:16:17 PM	Helium valve opened
12/23/2010	10:16:17 PM	Main Vac valve opened
12/23/2010	10:16:17 PM	Bypass valve opened
12/23/2010	10:16:17 PM	Helium MFC set to  100.000000
12/23/2010	10:16:17 PM	H2 MFC set to  0.000000
12/23/2010	10:16:17 PM	BCl3 MFC set to  0.000000
12/23/2010	10:16:17 PM	PHl3 MFC set to  0.000000
12/23/2010	10:16:17 PM	SiCl4 MFC set to  0.000000
12/23/2010	10:16:17 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	10:16:17 PM	Tube furnace set to 0
12/23/2010	10:17:17 PM	Helium valve closed
12/23/2010	10:17:17 PM	H2 valve closed
12/23/2010	10:17:17 PM	BCl3 valve closed
12/23/2010	10:17:17 PM	PH3 valve closed
12/23/2010	10:17:17 PM	SiCl4 pre valve closed
12/23/2010	10:17:17 PM	SiCl4 post valve closed
12/23/2010	10:17:17 PM	Bubbler valve closed
12/23/2010	10:17:17 PM	Main Vac valve opened
12/23/2010	10:17:17 PM	Bypass valve opened
12/23/2010	10:17:17 PM	Helium MFC set to  0.000000
12/23/2010	10:17:17 PM	H2 MFC set to  0.000000
12/23/2010	10:17:17 PM	BCl3 MFC set to  0.000000
12/23/2010	10:17:17 PM	PHl3 MFC set to  0.000000
12/23/2010	10:17:17 PM	SiCl4 MFC set to  0.000000
12/23/2010	10:17:17 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	10:17:17 PM	Tube furnace set to 0
12/23/2010	10:18:17 PM	H2 valve closed
12/23/2010	10:18:17 PM	BCl3 valve closed
12/23/2010	10:18:17 PM	PH3 valve closed
12/23/2010	10:18:17 PM	SiCl4 pre valve closed
12/23/2010	10:18:17 PM	SiCl4 post valve closed
12/23/2010	10:18:17 PM	Bubbler valve closed
12/23/2010	10:18:17 PM	Helium valve opened
12/23/2010	10:18:17 PM	Main Vac valve opened
12/23/2010	10:18:17 PM	Bypass valve opened
12/23/2010	10:18:17 PM	Helium MFC set to  100.000000
12/23/2010	10:18:17 PM	H2 MFC set to  0.000000
12/23/2010	10:18:17 PM	BCl3 MFC set to  0.000000
12/23/2010	10:18:17 PM	PHl3 MFC set to  0.000000
12/23/2010	10:18:17 PM	SiCl4 MFC set to  0.000000
12/23/2010	10:18:17 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	10:18:17 PM	Tube furnace set to 0
12/23/2010	10:19:17 PM	Helium valve closed
12/23/2010	10:19:17 PM	H2 valve closed
12/23/2010	10:19:17 PM	BCl3 valve closed
12/23/2010	10:19:17 PM	PH3 valve closed
12/23/2010	10:19:17 PM	SiCl4 pre valve closed
12/23/2010	10:19:17 PM	SiCl4 post valve closed
12/23/2010	10:19:17 PM	Bubbler valve closed
12/23/2010	10:19:17 PM	Main Vac valve opened
12/23/2010	10:19:17 PM	Bypass valve opened
12/23/2010	10:19:17 PM	Helium MFC set to  0.000000
12/23/2010	10:19:17 PM	H2 MFC set to  0.000000
12/23/2010	10:19:17 PM	BCl3 MFC set to  0.000000
12/23/2010	10:19:17 PM	PHl3 MFC set to  0.000000
12/23/2010	10:19:17 PM	SiCl4 MFC set to  0.000000
12/23/2010	10:19:17 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	10:19:18 PM	Tube furnace set to 0
12/23/2010	10:20:18 PM	H2 valve closed
12/23/2010	10:20:18 PM	BCl3 valve closed
12/23/2010	10:20:18 PM	PH3 valve closed
12/23/2010	10:20:18 PM	SiCl4 pre valve closed
12/23/2010	10:20:18 PM	SiCl4 post valve closed
12/23/2010	10:20:18 PM	Bubbler valve closed
12/23/2010	10:20:18 PM	Helium valve opened
12/23/2010	10:20:18 PM	Main Vac valve opened
12/23/2010	10:20:18 PM	Bypass valve opened
12/23/2010	10:20:18 PM	Helium MFC set to  100.000000
12/23/2010	10:20:18 PM	H2 MFC set to  0.000000
12/23/2010	10:20:18 PM	BCl3 MFC set to  0.000000
12/23/2010	10:20:18 PM	PHl3 MFC set to  0.000000
12/23/2010	10:20:18 PM	SiCl4 MFC set to  0.000000
12/23/2010	10:20:18 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	10:20:18 PM	Tube furnace set to 0
12/23/2010	10:21:18 PM	Helium valve closed
12/23/2010	10:21:18 PM	H2 valve closed
12/23/2010	10:21:18 PM	BCl3 valve closed
12/23/2010	10:21:18 PM	PH3 valve closed
12/23/2010	10:21:18 PM	SiCl4 pre valve closed
12/23/2010	10:21:18 PM	SiCl4 post valve closed
12/23/2010	10:21:18 PM	Bubbler valve closed
12/23/2010	10:21:18 PM	Main Vac valve opened
12/23/2010	10:21:18 PM	Bypass valve opened
12/23/2010	10:21:18 PM	Helium MFC set to  0.000000
12/23/2010	10:21:18 PM	H2 MFC set to  0.000000
12/23/2010	10:21:18 PM	BCl3 MFC set to  0.000000
12/23/2010	10:21:18 PM	PHl3 MFC set to  0.000000
12/23/2010	10:21:18 PM	SiCl4 MFC set to  0.000000
12/23/2010	10:21:18 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	10:21:18 PM	Tube furnace set to 0
12/23/2010	10:22:18 PM	H2 valve closed
12/23/2010	10:22:18 PM	BCl3 valve closed
12/23/2010	10:22:18 PM	PH3 valve closed
12/23/2010	10:22:18 PM	SiCl4 pre valve closed
12/23/2010	10:22:18 PM	SiCl4 post valve closed
12/23/2010	10:22:18 PM	Bubbler valve closed
12/23/2010	10:22:18 PM	Helium valve opened
12/23/2010	10:22:18 PM	Main Vac valve opened
12/23/2010	10:22:18 PM	Bypass valve opened
12/23/2010	10:22:18 PM	Helium MFC set to  100.000000
12/23/2010	10:22:18 PM	H2 MFC set to  0.000000
12/23/2010	10:22:18 PM	BCl3 MFC set to  0.000000
12/23/2010	10:22:18 PM	PHl3 MFC set to  0.000000
12/23/2010	10:22:18 PM	SiCl4 MFC set to  0.000000
12/23/2010	10:22:18 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	10:22:18 PM	Tube furnace set to 0
12/23/2010	10:23:18 PM	Helium valve closed
12/23/2010	10:23:18 PM	H2 valve closed
12/23/2010	10:23:18 PM	BCl3 valve closed
12/23/2010	10:23:18 PM	PH3 valve closed
12/23/2010	10:23:18 PM	SiCl4 pre valve closed
12/23/2010	10:23:18 PM	SiCl4 post valve closed
12/23/2010	10:23:18 PM	Bubbler valve closed
12/23/2010	10:23:18 PM	Main Vac valve opened
12/23/2010	10:23:18 PM	Bypass valve opened
12/23/2010	10:23:18 PM	Helium MFC set to  0.000000
12/23/2010	10:23:18 PM	H2 MFC set to  0.000000
12/23/2010	10:23:18 PM	BCl3 MFC set to  0.000000
12/23/2010	10:23:18 PM	PHl3 MFC set to  0.000000
12/23/2010	10:23:18 PM	SiCl4 MFC set to  0.000000
12/23/2010	10:23:18 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	10:23:18 PM	Tube furnace set to 0
12/23/2010	10:24:18 PM	H2 valve closed
12/23/2010	10:24:18 PM	BCl3 valve closed
12/23/2010	10:24:18 PM	PH3 valve closed
12/23/2010	10:24:18 PM	SiCl4 pre valve closed
12/23/2010	10:24:18 PM	SiCl4 post valve closed
12/23/2010	10:24:18 PM	Bubbler valve closed
12/23/2010	10:24:18 PM	Helium valve opened
12/23/2010	10:24:18 PM	Main Vac valve opened
12/23/2010	10:24:18 PM	Bypass valve opened
12/23/2010	10:24:18 PM	Helium MFC set to  100.000000
12/23/2010	10:24:18 PM	H2 MFC set to  0.000000
12/23/2010	10:24:18 PM	BCl3 MFC set to  0.000000
12/23/2010	10:24:18 PM	PHl3 MFC set to  0.000000
12/23/2010	10:24:18 PM	SiCl4 MFC set to  0.000000
12/23/2010	10:24:18 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	10:24:19 PM	Tube furnace set to 0
12/23/2010	10:25:19 PM	Helium valve closed
12/23/2010	10:25:19 PM	H2 valve closed
12/23/2010	10:25:19 PM	BCl3 valve closed
12/23/2010	10:25:19 PM	PH3 valve closed
12/23/2010	10:25:19 PM	SiCl4 pre valve closed
12/23/2010	10:25:19 PM	SiCl4 post valve closed
12/23/2010	10:25:19 PM	Bubbler valve closed
12/23/2010	10:25:19 PM	Main Vac valve opened
12/23/2010	10:25:19 PM	Bypass valve opened
12/23/2010	10:25:19 PM	Helium MFC set to  0.000000
12/23/2010	10:25:19 PM	H2 MFC set to  0.000000
12/23/2010	10:25:19 PM	BCl3 MFC set to  0.000000
12/23/2010	10:25:19 PM	PHl3 MFC set to  0.000000
12/23/2010	10:25:19 PM	SiCl4 MFC set to  0.000000
12/23/2010	10:25:19 PM	Bypass solenoid MFC set to  0.000000
12/23/2010	10:25:19 PM	Tube furnace set to 0
12/23/2010	10:25:20 PM	Run finished at 10:25 PM
12/23/2010	10:25:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
